8/19/2010	12:08:16 AM	Helium valve closed
8/19/2010	12:09:40 AM	Helium valve opened
8/19/2010	12:23:21 AM	Helium valve closed
8/19/2010	12:24:26 AM	Recipe started at 12:24 AM
8/19/2010	12:24:26 AM	Helium valve closed
8/19/2010	12:24:26 AM	BCl3 valve closed
8/19/2010	12:24:26 AM	PH3 valve closed
8/19/2010	12:24:26 AM	SiCl4 pre valve closed
8/19/2010	12:24:26 AM	SiCl4 post valve closed
8/19/2010	12:24:26 AM	Main Vac valve closed
8/19/2010	12:24:26 AM	Bypass valve closed
8/19/2010	12:24:26 AM	Bubbler valve closed
8/19/2010	12:24:26 AM	H2 valve opened
8/19/2010	12:24:26 AM	Helium MFC set to  0.000000
8/19/2010	12:24:26 AM	H2 MFC set to  500.000000
8/19/2010	12:24:26 AM	BCl3 MFC set to  0.000000
8/19/2010	12:24:26 AM	PHl3 MFC set to  0.000000
8/19/2010	12:24:26 AM	SiCl4 MFC set to  0.000000
8/19/2010	12:24:26 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:24:26 AM	Tube furnace set to 1000
8/19/2010	12:25:46 AM	Helium valve closed
8/19/2010	12:25:46 AM	BCl3 valve closed
8/19/2010	12:25:46 AM	PH3 valve closed
8/19/2010	12:25:46 AM	SiCl4 pre valve closed
8/19/2010	12:25:46 AM	SiCl4 post valve closed
8/19/2010	12:25:46 AM	Main Vac valve closed
8/19/2010	12:25:46 AM	Bypass valve closed
8/19/2010	12:25:46 AM	H2 valve opened
8/19/2010	12:25:46 AM	Bubbler valve opened
8/19/2010	12:25:46 AM	Helium MFC set to  0.000000
8/19/2010	12:25:46 AM	H2 MFC set to  500.000000
8/19/2010	12:25:46 AM	BCl3 MFC set to  0.000000
8/19/2010	12:25:46 AM	PHl3 MFC set to  0.000000
8/19/2010	12:25:46 AM	SiCl4 MFC set to  0.000000
8/19/2010	12:25:46 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:25:46 AM	Tube furnace set to 1000
8/19/2010	12:45:46 AM	Helium valve closed
8/19/2010	12:45:46 AM	BCl3 valve closed
8/19/2010	12:45:46 AM	PH3 valve closed
8/19/2010	12:45:46 AM	Main Vac valve closed
8/19/2010	12:45:46 AM	Bypass valve closed
8/19/2010	12:45:46 AM	H2 valve opened
8/19/2010	12:45:46 AM	SiCl4 pre valve opened
8/19/2010	12:45:46 AM	SiCl4 post valve opened
8/19/2010	12:45:46 AM	Bubbler valve opened
8/19/2010	12:45:46 AM	Helium MFC set to  0.000000
8/19/2010	12:45:46 AM	H2 MFC set to  500.000000
8/19/2010	12:45:46 AM	BCl3 MFC set to  0.000000
8/19/2010	12:45:46 AM	PHl3 MFC set to  0.000000
8/19/2010	12:45:46 AM	SiCl4 MFC set to  50.000000
8/19/2010	12:45:46 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:45:46 AM	Tube furnace set to 1000
8/19/2010	1:05:46 AM	BCl3 valve closed
8/19/2010	1:05:46 AM	PH3 valve closed
8/19/2010	1:05:46 AM	SiCl4 pre valve closed
8/19/2010	1:05:46 AM	SiCl4 post valve closed
8/19/2010	1:05:46 AM	Main Vac valve closed
8/19/2010	1:05:46 AM	Bypass valve closed
8/19/2010	1:05:46 AM	Helium valve opened
8/19/2010	1:05:46 AM	H2 valve opened
8/19/2010	1:05:46 AM	Bubbler valve opened
8/19/2010	1:05:46 AM	Helium MFC set to  250.000000
8/19/2010	1:05:46 AM	H2 MFC set to  250.000000
8/19/2010	1:05:46 AM	BCl3 MFC set to  0.000000
8/19/2010	1:05:46 AM	PHl3 MFC set to  0.000000
8/19/2010	1:05:46 AM	SiCl4 MFC set to  0.000000
8/19/2010	1:05:46 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	1:05:46 AM	Tube furnace set to 0
8/19/2010	1:36:02 AM	Run aborted at 1:36 AM
8/19/2010	1:36:02 AM	Helium valve closed
8/19/2010	1:36:02 AM	H2 valve closed
8/19/2010	1:36:02 AM	BCl3 valve closed
8/19/2010	1:36:02 AM	PH3 valve closed
8/19/2010	1:36:02 AM	SiCl4 pre valve closed
8/19/2010	1:36:02 AM	SiCl4 post valve closed
8/19/2010	1:36:02 AM	Bypass valve closed
8/19/2010	1:36:02 AM	Main Vac valve closed
8/19/2010	1:36:02 AM	Bubbler valve closed
8/19/2010	1:36:02 AM	Helium MFC set to  0.000000
8/19/2010	1:36:02 AM	H2 MFC set to  0.000000
8/19/2010	1:36:02 AM	BCl3 MFC set to  0.000000
8/19/2010	1:36:02 AM	PHl3 MFC set to  0.000000
8/19/2010	1:36:02 AM	SiCl4 MFC set to  0.000000
8/19/2010	1:36:02 AM	Tube furnace set to 0
8/19/2010	1:38:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	1:38:56 AM	Recipe started at 1:38 AM
8/19/2010	1:38:56 AM	Helium valve closed
8/19/2010	1:38:56 AM	H2 valve closed
8/19/2010	1:38:56 AM	BCl3 valve closed
8/19/2010	1:38:56 AM	PH3 valve closed
8/19/2010	1:38:56 AM	SiCl4 pre valve closed
8/19/2010	1:38:56 AM	SiCl4 post valve closed
8/19/2010	1:38:56 AM	Main Vac valve closed
8/19/2010	1:38:56 AM	Bubbler valve closed
8/19/2010	1:38:56 AM	Bypass valve opened
8/19/2010	1:38:56 AM	Helium MFC set to  0.000000
8/19/2010	1:38:56 AM	H2 MFC set to  0.000000
8/19/2010	1:38:56 AM	BCl3 MFC set to  0.000000
8/19/2010	1:38:56 AM	PHl3 MFC set to  0.000000
8/19/2010	1:38:56 AM	SiCl4 MFC set to  0.000000
8/19/2010	1:38:56 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	1:38:56 AM	Tube furnace set to 0
8/19/2010	1:39:32 AM	Helium valve closed
8/19/2010	1:39:32 AM	H2 valve closed
8/19/2010	1:39:32 AM	BCl3 valve closed
8/19/2010	1:39:32 AM	PH3 valve closed
8/19/2010	1:39:32 AM	SiCl4 pre valve closed
8/19/2010	1:39:32 AM	SiCl4 post valve closed
8/19/2010	1:39:32 AM	Bubbler valve closed
8/19/2010	1:39:32 AM	Main Vac valve opened
8/19/2010	1:39:32 AM	Bypass valve opened
8/19/2010	1:39:32 AM	Helium MFC set to  0.000000
8/19/2010	1:39:32 AM	H2 MFC set to  0.000000
8/19/2010	1:39:32 AM	BCl3 MFC set to  0.000000
8/19/2010	1:39:32 AM	PHl3 MFC set to  0.000000
8/19/2010	1:39:32 AM	SiCl4 MFC set to  0.000000
8/19/2010	1:39:32 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	1:39:32 AM	Tube furnace set to 0
8/19/2010	1:39:32 AM	Run finished at 1:39 AM
8/19/2010	1:39:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	8:57:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	8:57:18 AM	Recipe started at 8:57 AM
8/19/2010	8:57:18 AM	H2 valve closed
8/19/2010	8:57:18 AM	BCl3 valve closed
8/19/2010	8:57:18 AM	PH3 valve closed
8/19/2010	8:57:18 AM	SiCl4 pre valve closed
8/19/2010	8:57:18 AM	SiCl4 post valve closed
8/19/2010	8:57:18 AM	Main Vac valve closed
8/19/2010	8:57:18 AM	Bypass valve closed
8/19/2010	8:57:18 AM	Bubbler valve closed
8/19/2010	8:57:18 AM	Helium valve opened
8/19/2010	8:57:18 AM	Helium MFC set to  500.000000
8/19/2010	8:57:18 AM	H2 MFC set to  0.000000
8/19/2010	8:57:18 AM	BCl3 MFC set to  0.000000
8/19/2010	8:57:18 AM	PHl3 MFC set to  0.000000
8/19/2010	8:57:18 AM	SiCl4 MFC set to  0.000000
8/19/2010	8:57:18 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	8:57:18 AM	Tube furnace set to 0
8/19/2010	8:58:37 AM	Helium valve closed
8/19/2010	8:58:37 AM	H2 valve closed
8/19/2010	8:58:37 AM	BCl3 valve closed
8/19/2010	8:58:37 AM	PH3 valve closed
8/19/2010	8:58:37 AM	SiCl4 pre valve closed
8/19/2010	8:58:37 AM	SiCl4 post valve closed
8/19/2010	8:58:37 AM	Main Vac valve closed
8/19/2010	8:58:37 AM	Bypass valve closed
8/19/2010	8:58:37 AM	Bubbler valve closed
8/19/2010	8:58:37 AM	Helium MFC set to  0.000000
8/19/2010	8:58:37 AM	H2 MFC set to  0.000000
8/19/2010	8:58:37 AM	BCl3 MFC set to  0.000000
8/19/2010	8:58:37 AM	PHl3 MFC set to  0.000000
8/19/2010	8:58:37 AM	SiCl4 MFC set to  0.000000
8/19/2010	8:58:37 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	8:58:37 AM	Tube furnace set to 0
8/19/2010	8:58:38 AM	Run finished at 8:58 AM
8/19/2010	8:58:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	9:23:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	9:23:42 AM	Recipe started at 9:23 AM
8/19/2010	9:23:42 AM	Helium valve closed
8/19/2010	9:23:42 AM	H2 valve closed
8/19/2010	9:23:42 AM	BCl3 valve closed
8/19/2010	9:23:42 AM	PH3 valve closed
8/19/2010	9:23:42 AM	SiCl4 pre valve closed
8/19/2010	9:23:42 AM	SiCl4 post valve closed
8/19/2010	9:23:42 AM	Main Vac valve closed
8/19/2010	9:23:42 AM	Bubbler valve closed
8/19/2010	9:23:42 AM	Bypass valve opened
8/19/2010	9:23:42 AM	Helium MFC set to  0.000000
8/19/2010	9:23:42 AM	H2 MFC set to  0.000000
8/19/2010	9:23:42 AM	BCl3 MFC set to  0.000000
8/19/2010	9:23:42 AM	PHl3 MFC set to  0.000000
8/19/2010	9:23:42 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:23:42 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:23:42 AM	Tube furnace set to 0
8/19/2010	9:24:24 AM	Helium valve closed
8/19/2010	9:24:24 AM	H2 valve closed
8/19/2010	9:24:24 AM	BCl3 valve closed
8/19/2010	9:24:24 AM	PH3 valve closed
8/19/2010	9:24:24 AM	SiCl4 pre valve closed
8/19/2010	9:24:24 AM	SiCl4 post valve closed
8/19/2010	9:24:24 AM	Bubbler valve closed
8/19/2010	9:24:24 AM	Main Vac valve opened
8/19/2010	9:24:24 AM	Bypass valve opened
8/19/2010	9:24:24 AM	Helium MFC set to  0.000000
8/19/2010	9:24:24 AM	H2 MFC set to  0.000000
8/19/2010	9:24:24 AM	BCl3 MFC set to  0.000000
8/19/2010	9:24:24 AM	PHl3 MFC set to  0.000000
8/19/2010	9:24:24 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:24:24 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:24:24 AM	Tube furnace set to 0
8/19/2010	9:24:24 AM	Run finished at 9:24 AM
8/19/2010	9:24:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	9:29:48 AM	Bypass valve closed
8/19/2010	9:29:48 AM	Bypass valve opened
8/19/2010	9:29:49 AM	Bypass valve closed
8/19/2010	9:29:50 AM	Main Vac valve closed
8/19/2010	9:30:08 AM	Bypass valve opened
8/19/2010	9:30:09 AM	Bypass valve closed
8/19/2010	9:30:10 AM	Bypass valve opened
8/19/2010	9:30:10 AM	Main Vac valve opened
8/19/2010	9:41:47 AM	Main Vac valve closed
8/19/2010	9:41:48 AM	Bypass valve closed
8/19/2010	9:41:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	9:41:58 AM	Recipe started at 9:41 AM
8/19/2010	9:41:58 AM	H2 valve closed
8/19/2010	9:41:58 AM	BCl3 valve closed
8/19/2010	9:41:58 AM	PH3 valve closed
8/19/2010	9:41:58 AM	SiCl4 pre valve closed
8/19/2010	9:41:58 AM	SiCl4 post valve closed
8/19/2010	9:41:58 AM	Main Vac valve closed
8/19/2010	9:41:58 AM	Bypass valve closed
8/19/2010	9:41:58 AM	Bubbler valve closed
8/19/2010	9:41:58 AM	Helium valve opened
8/19/2010	9:41:58 AM	Helium MFC set to  500.000000
8/19/2010	9:41:58 AM	H2 MFC set to  0.000000
8/19/2010	9:41:58 AM	BCl3 MFC set to  0.000000
8/19/2010	9:41:58 AM	PHl3 MFC set to  0.000000
8/19/2010	9:41:58 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:41:58 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:41:58 AM	Tube furnace set to 0
8/19/2010	9:43:16 AM	Helium valve closed
8/19/2010	9:43:16 AM	H2 valve closed
8/19/2010	9:43:16 AM	BCl3 valve closed
8/19/2010	9:43:16 AM	PH3 valve closed
8/19/2010	9:43:16 AM	SiCl4 pre valve closed
8/19/2010	9:43:16 AM	SiCl4 post valve closed
8/19/2010	9:43:16 AM	Main Vac valve closed
8/19/2010	9:43:16 AM	Bypass valve closed
8/19/2010	9:43:16 AM	Bubbler valve closed
8/19/2010	9:43:16 AM	Helium MFC set to  0.000000
8/19/2010	9:43:16 AM	H2 MFC set to  0.000000
8/19/2010	9:43:16 AM	BCl3 MFC set to  0.000000
8/19/2010	9:43:16 AM	PHl3 MFC set to  0.000000
8/19/2010	9:43:16 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:43:16 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:43:16 AM	Tube furnace set to 0
8/19/2010	9:43:17 AM	Run finished at 9:43 AM
8/19/2010	9:43:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	9:47:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	9:47:50 AM	Recipe started at 9:47 AM
8/19/2010	9:47:50 AM	Helium valve closed
8/19/2010	9:47:50 AM	H2 valve closed
8/19/2010	9:47:50 AM	BCl3 valve closed
8/19/2010	9:47:50 AM	PH3 valve closed
8/19/2010	9:47:50 AM	SiCl4 pre valve closed
8/19/2010	9:47:50 AM	SiCl4 post valve closed
8/19/2010	9:47:50 AM	Main Vac valve closed
8/19/2010	9:47:50 AM	Bubbler valve closed
8/19/2010	9:47:50 AM	Bypass valve opened
8/19/2010	9:47:50 AM	Helium MFC set to  0.000000
8/19/2010	9:47:50 AM	H2 MFC set to  0.000000
8/19/2010	9:47:50 AM	BCl3 MFC set to  0.000000
8/19/2010	9:47:50 AM	PHl3 MFC set to  0.000000
8/19/2010	9:47:50 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:47:50 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:47:51 AM	Tube furnace set to 0
8/19/2010	9:48:29 AM	Helium valve closed
8/19/2010	9:48:29 AM	H2 valve closed
8/19/2010	9:48:29 AM	BCl3 valve closed
8/19/2010	9:48:29 AM	PH3 valve closed
8/19/2010	9:48:29 AM	SiCl4 pre valve closed
8/19/2010	9:48:29 AM	SiCl4 post valve closed
8/19/2010	9:48:29 AM	Bubbler valve closed
8/19/2010	9:48:29 AM	Main Vac valve opened
8/19/2010	9:48:29 AM	Bypass valve opened
8/19/2010	9:48:29 AM	Helium MFC set to  0.000000
8/19/2010	9:48:29 AM	H2 MFC set to  0.000000
8/19/2010	9:48:29 AM	BCl3 MFC set to  0.000000
8/19/2010	9:48:29 AM	PHl3 MFC set to  0.000000
8/19/2010	9:48:29 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:48:29 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:48:29 AM	Tube furnace set to 0
8/19/2010	9:48:30 AM	Run finished at 9:48 AM
8/19/2010	9:48:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	9:51:08 AM	Main Vac valve closed
8/19/2010	9:51:11 AM	Bypass valve closed
8/19/2010	9:51:34 AM	Bypass valve opened
8/19/2010	9:51:39 AM	Main Vac valve opened
8/19/2010	9:55:08 AM	Main Vac valve closed
8/19/2010	9:55:10 AM	Bypass valve closed
8/19/2010	9:56:04 AM	Bypass valve opened
8/19/2010	9:56:07 AM	Main Vac valve opened
8/19/2010	9:56:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	9:56:30 AM	Recipe started at 9:56 AM
8/19/2010	9:56:30 AM	H2 valve closed
8/19/2010	9:56:30 AM	BCl3 valve closed
8/19/2010	9:56:30 AM	PH3 valve closed
8/19/2010	9:56:30 AM	SiCl4 pre valve closed
8/19/2010	9:56:30 AM	SiCl4 post valve closed
8/19/2010	9:56:30 AM	Main Vac valve closed
8/19/2010	9:56:30 AM	Bypass valve closed
8/19/2010	9:56:30 AM	Bubbler valve closed
8/19/2010	9:56:30 AM	Helium valve opened
8/19/2010	9:56:30 AM	Helium MFC set to  500.000000
8/19/2010	9:56:30 AM	H2 MFC set to  0.000000
8/19/2010	9:56:30 AM	BCl3 MFC set to  0.000000
8/19/2010	9:56:30 AM	PHl3 MFC set to  0.000000
8/19/2010	9:56:30 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:56:30 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:56:31 AM	Tube furnace set to 0
8/19/2010	9:57:53 AM	Helium valve closed
8/19/2010	9:57:53 AM	H2 valve closed
8/19/2010	9:57:53 AM	BCl3 valve closed
8/19/2010	9:57:53 AM	PH3 valve closed
8/19/2010	9:57:53 AM	SiCl4 pre valve closed
8/19/2010	9:57:53 AM	SiCl4 post valve closed
8/19/2010	9:57:53 AM	Main Vac valve closed
8/19/2010	9:57:53 AM	Bypass valve closed
8/19/2010	9:57:53 AM	Bubbler valve closed
8/19/2010	9:57:53 AM	Helium MFC set to  0.000000
8/19/2010	9:57:53 AM	H2 MFC set to  0.000000
8/19/2010	9:57:53 AM	BCl3 MFC set to  0.000000
8/19/2010	9:57:53 AM	PHl3 MFC set to  0.000000
8/19/2010	9:57:53 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:57:53 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:57:53 AM	Tube furnace set to 0
8/19/2010	9:58:08 AM	Helium valve closed
8/19/2010	9:58:08 AM	H2 valve closed
8/19/2010	9:58:08 AM	BCl3 valve closed
8/19/2010	9:58:08 AM	PH3 valve closed
8/19/2010	9:58:08 AM	SiCl4 pre valve closed
8/19/2010	9:58:08 AM	SiCl4 post valve closed
8/19/2010	9:58:08 AM	Main Vac valve closed
8/19/2010	9:58:08 AM	Bubbler valve closed
8/19/2010	9:58:08 AM	Bypass valve opened
8/19/2010	9:58:08 AM	Helium MFC set to  0.000000
8/19/2010	9:58:08 AM	H2 MFC set to  0.000000
8/19/2010	9:58:08 AM	BCl3 MFC set to  0.000000
8/19/2010	9:58:08 AM	PHl3 MFC set to  0.000000
8/19/2010	9:58:08 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:58:08 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:58:08 AM	Tube furnace set to 0
8/19/2010	9:58:36 AM	Helium valve closed
8/19/2010	9:58:36 AM	H2 valve closed
8/19/2010	9:58:36 AM	BCl3 valve closed
8/19/2010	9:58:36 AM	PH3 valve closed
8/19/2010	9:58:36 AM	SiCl4 pre valve closed
8/19/2010	9:58:36 AM	SiCl4 post valve closed
8/19/2010	9:58:36 AM	Bubbler valve closed
8/19/2010	9:58:36 AM	Main Vac valve opened
8/19/2010	9:58:36 AM	Bypass valve opened
8/19/2010	9:58:36 AM	Helium MFC set to  0.000000
8/19/2010	9:58:36 AM	H2 MFC set to  0.000000
8/19/2010	9:58:36 AM	BCl3 MFC set to  0.000000
8/19/2010	9:58:36 AM	PHl3 MFC set to  0.000000
8/19/2010	9:58:36 AM	SiCl4 MFC set to  0.000000
8/19/2010	9:58:36 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	9:58:36 AM	Tube furnace set to 0
8/19/2010	10:03:36 AM	H2 valve closed
8/19/2010	10:03:36 AM	BCl3 valve closed
8/19/2010	10:03:36 AM	PH3 valve closed
8/19/2010	10:03:36 AM	SiCl4 pre valve closed
8/19/2010	10:03:36 AM	SiCl4 post valve closed
8/19/2010	10:03:36 AM	Main Vac valve closed
8/19/2010	10:03:36 AM	Bypass valve closed
8/19/2010	10:03:36 AM	Bubbler valve closed
8/19/2010	10:03:36 AM	Helium valve opened
8/19/2010	10:03:36 AM	Helium MFC set to  500.000000
8/19/2010	10:03:36 AM	H2 MFC set to  0.000000
8/19/2010	10:03:36 AM	BCl3 MFC set to  0.000000
8/19/2010	10:03:36 AM	PHl3 MFC set to  0.000000
8/19/2010	10:03:36 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:03:36 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:03:37 AM	Tube furnace set to 0
8/19/2010	10:04:59 AM	Helium valve closed
8/19/2010	10:04:59 AM	H2 valve closed
8/19/2010	10:04:59 AM	BCl3 valve closed
8/19/2010	10:04:59 AM	PH3 valve closed
8/19/2010	10:04:59 AM	SiCl4 pre valve closed
8/19/2010	10:04:59 AM	SiCl4 post valve closed
8/19/2010	10:04:59 AM	Main Vac valve closed
8/19/2010	10:04:59 AM	Bypass valve closed
8/19/2010	10:04:59 AM	Bubbler valve closed
8/19/2010	10:04:59 AM	Helium MFC set to  0.000000
8/19/2010	10:04:59 AM	H2 MFC set to  0.000000
8/19/2010	10:04:59 AM	BCl3 MFC set to  0.000000
8/19/2010	10:04:59 AM	PHl3 MFC set to  0.000000
8/19/2010	10:04:59 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:04:59 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:04:59 AM	Tube furnace set to 0
8/19/2010	10:05:14 AM	Helium valve closed
8/19/2010	10:05:14 AM	H2 valve closed
8/19/2010	10:05:14 AM	BCl3 valve closed
8/19/2010	10:05:14 AM	PH3 valve closed
8/19/2010	10:05:14 AM	SiCl4 pre valve closed
8/19/2010	10:05:14 AM	SiCl4 post valve closed
8/19/2010	10:05:14 AM	Main Vac valve closed
8/19/2010	10:05:14 AM	Bubbler valve closed
8/19/2010	10:05:14 AM	Bypass valve opened
8/19/2010	10:05:14 AM	Helium MFC set to  0.000000
8/19/2010	10:05:14 AM	H2 MFC set to  0.000000
8/19/2010	10:05:14 AM	BCl3 MFC set to  0.000000
8/19/2010	10:05:14 AM	PHl3 MFC set to  0.000000
8/19/2010	10:05:14 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:05:14 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:05:14 AM	Tube furnace set to 0
8/19/2010	10:05:42 AM	Helium valve closed
8/19/2010	10:05:42 AM	H2 valve closed
8/19/2010	10:05:42 AM	BCl3 valve closed
8/19/2010	10:05:42 AM	PH3 valve closed
8/19/2010	10:05:42 AM	SiCl4 pre valve closed
8/19/2010	10:05:42 AM	SiCl4 post valve closed
8/19/2010	10:05:42 AM	Bubbler valve closed
8/19/2010	10:05:42 AM	Main Vac valve opened
8/19/2010	10:05:42 AM	Bypass valve opened
8/19/2010	10:05:42 AM	Helium MFC set to  0.000000
8/19/2010	10:05:42 AM	H2 MFC set to  0.000000
8/19/2010	10:05:42 AM	BCl3 MFC set to  0.000000
8/19/2010	10:05:42 AM	PHl3 MFC set to  0.000000
8/19/2010	10:05:42 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:05:42 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:05:42 AM	Tube furnace set to 0
8/19/2010	10:10:42 AM	H2 valve closed
8/19/2010	10:10:42 AM	BCl3 valve closed
8/19/2010	10:10:42 AM	PH3 valve closed
8/19/2010	10:10:42 AM	SiCl4 pre valve closed
8/19/2010	10:10:42 AM	SiCl4 post valve closed
8/19/2010	10:10:42 AM	Main Vac valve closed
8/19/2010	10:10:42 AM	Bypass valve closed
8/19/2010	10:10:42 AM	Bubbler valve closed
8/19/2010	10:10:43 AM	Helium valve opened
8/19/2010	10:10:43 AM	Helium MFC set to  500.000000
8/19/2010	10:10:43 AM	H2 MFC set to  0.000000
8/19/2010	10:10:43 AM	BCl3 MFC set to  0.000000
8/19/2010	10:10:43 AM	PHl3 MFC set to  0.000000
8/19/2010	10:10:43 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:10:43 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:10:43 AM	Tube furnace set to 0
8/19/2010	10:12:05 AM	Helium valve closed
8/19/2010	10:12:05 AM	H2 valve closed
8/19/2010	10:12:05 AM	BCl3 valve closed
8/19/2010	10:12:05 AM	PH3 valve closed
8/19/2010	10:12:05 AM	SiCl4 pre valve closed
8/19/2010	10:12:05 AM	SiCl4 post valve closed
8/19/2010	10:12:05 AM	Main Vac valve closed
8/19/2010	10:12:05 AM	Bypass valve closed
8/19/2010	10:12:05 AM	Bubbler valve closed
8/19/2010	10:12:05 AM	Helium MFC set to  0.000000
8/19/2010	10:12:05 AM	H2 MFC set to  0.000000
8/19/2010	10:12:05 AM	BCl3 MFC set to  0.000000
8/19/2010	10:12:05 AM	PHl3 MFC set to  0.000000
8/19/2010	10:12:05 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:12:05 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:12:05 AM	Tube furnace set to 0
8/19/2010	10:12:20 AM	Helium valve closed
8/19/2010	10:12:20 AM	H2 valve closed
8/19/2010	10:12:20 AM	BCl3 valve closed
8/19/2010	10:12:20 AM	PH3 valve closed
8/19/2010	10:12:20 AM	SiCl4 pre valve closed
8/19/2010	10:12:20 AM	SiCl4 post valve closed
8/19/2010	10:12:20 AM	Main Vac valve closed
8/19/2010	10:12:20 AM	Bubbler valve closed
8/19/2010	10:12:20 AM	Bypass valve opened
8/19/2010	10:12:20 AM	Helium MFC set to  0.000000
8/19/2010	10:12:20 AM	H2 MFC set to  0.000000
8/19/2010	10:12:20 AM	BCl3 MFC set to  0.000000
8/19/2010	10:12:20 AM	PHl3 MFC set to  0.000000
8/19/2010	10:12:20 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:12:20 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:12:20 AM	Tube furnace set to 0
8/19/2010	10:12:48 AM	Helium valve closed
8/19/2010	10:12:48 AM	H2 valve closed
8/19/2010	10:12:48 AM	BCl3 valve closed
8/19/2010	10:12:48 AM	PH3 valve closed
8/19/2010	10:12:48 AM	SiCl4 pre valve closed
8/19/2010	10:12:48 AM	SiCl4 post valve closed
8/19/2010	10:12:48 AM	Bubbler valve closed
8/19/2010	10:12:48 AM	Main Vac valve opened
8/19/2010	10:12:48 AM	Bypass valve opened
8/19/2010	10:12:48 AM	Helium MFC set to  0.000000
8/19/2010	10:12:48 AM	H2 MFC set to  0.000000
8/19/2010	10:12:48 AM	BCl3 MFC set to  0.000000
8/19/2010	10:12:48 AM	PHl3 MFC set to  0.000000
8/19/2010	10:12:48 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:12:48 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:12:48 AM	Tube furnace set to 0
8/19/2010	10:17:49 AM	Helium valve closed
8/19/2010	10:17:49 AM	H2 valve closed
8/19/2010	10:17:49 AM	BCl3 valve closed
8/19/2010	10:17:49 AM	PH3 valve closed
8/19/2010	10:17:49 AM	SiCl4 pre valve closed
8/19/2010	10:17:49 AM	SiCl4 post valve closed
8/19/2010	10:17:49 AM	Bubbler valve closed
8/19/2010	10:17:49 AM	Main Vac valve opened
8/19/2010	10:17:49 AM	Bypass valve opened
8/19/2010	10:17:49 AM	Helium MFC set to  0.000000
8/19/2010	10:17:49 AM	H2 MFC set to  0.000000
8/19/2010	10:17:49 AM	BCl3 MFC set to  0.000000
8/19/2010	10:17:49 AM	PHl3 MFC set to  0.000000
8/19/2010	10:17:49 AM	SiCl4 MFC set to  0.000000
8/19/2010	10:17:49 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	10:17:49 AM	Tube furnace set to 0
8/19/2010	10:17:50 AM	Run finished at 10:17 AM
8/19/2010	10:17:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	11:12:17 AM	Main Vac valve closed
8/19/2010	11:12:18 AM	Bypass valve closed
8/19/2010	11:12:30 AM	Bypass valve opened
8/19/2010	11:12:31 AM	Main Vac valve opened
8/19/2010	11:12:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	11:12:47 AM	Recipe started at 11:12 AM
8/19/2010	11:12:47 AM	Helium valve closed
8/19/2010	11:12:47 AM	H2 valve closed
8/19/2010	11:12:47 AM	BCl3 valve closed
8/19/2010	11:12:47 AM	PH3 valve closed
8/19/2010	11:12:47 AM	SiCl4 pre valve closed
8/19/2010	11:12:47 AM	SiCl4 post valve closed
8/19/2010	11:12:47 AM	Main Vac valve closed
8/19/2010	11:12:47 AM	Bubbler valve closed
8/19/2010	11:12:47 AM	Bypass valve opened
8/19/2010	11:12:47 AM	Helium MFC set to  0.000000
8/19/2010	11:12:47 AM	H2 MFC set to  0.000000
8/19/2010	11:12:47 AM	BCl3 MFC set to  0.000000
8/19/2010	11:12:47 AM	PHl3 MFC set to  0.000000
8/19/2010	11:12:47 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:12:47 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:12:47 AM	Tube furnace set to 0
8/19/2010	11:12:47 AM	Helium valve closed
8/19/2010	11:12:47 AM	H2 valve closed
8/19/2010	11:12:47 AM	BCl3 valve closed
8/19/2010	11:12:47 AM	PH3 valve closed
8/19/2010	11:12:47 AM	SiCl4 pre valve closed
8/19/2010	11:12:47 AM	SiCl4 post valve closed
8/19/2010	11:12:47 AM	Bubbler valve closed
8/19/2010	11:12:47 AM	Main Vac valve opened
8/19/2010	11:12:47 AM	Bypass valve opened
8/19/2010	11:12:47 AM	Helium MFC set to  0.000000
8/19/2010	11:12:47 AM	H2 MFC set to  0.000000
8/19/2010	11:12:47 AM	BCl3 MFC set to  0.000000
8/19/2010	11:12:47 AM	PHl3 MFC set to  0.000000
8/19/2010	11:12:47 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:12:47 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:12:47 AM	Tube furnace set to 0
8/19/2010	11:13:48 AM	H2 valve closed
8/19/2010	11:13:48 AM	BCl3 valve closed
8/19/2010	11:13:48 AM	PH3 valve closed
8/19/2010	11:13:48 AM	SiCl4 pre valve closed
8/19/2010	11:13:48 AM	SiCl4 post valve closed
8/19/2010	11:13:48 AM	Bubbler valve closed
8/19/2010	11:13:48 AM	Helium valve opened
8/19/2010	11:13:48 AM	Main Vac valve opened
8/19/2010	11:13:48 AM	Bypass valve opened
8/19/2010	11:13:48 AM	Helium MFC set to  100.000000
8/19/2010	11:13:48 AM	H2 MFC set to  0.000000
8/19/2010	11:13:48 AM	BCl3 MFC set to  0.000000
8/19/2010	11:13:48 AM	PHl3 MFC set to  0.000000
8/19/2010	11:13:48 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:13:48 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:13:48 AM	Tube furnace set to 0
8/19/2010	11:22:48 AM	Helium valve closed
8/19/2010	11:22:48 AM	H2 valve closed
8/19/2010	11:22:48 AM	BCl3 valve closed
8/19/2010	11:22:48 AM	PH3 valve closed
8/19/2010	11:22:48 AM	SiCl4 pre valve closed
8/19/2010	11:22:48 AM	SiCl4 post valve closed
8/19/2010	11:22:48 AM	Bubbler valve closed
8/19/2010	11:22:48 AM	Main Vac valve opened
8/19/2010	11:22:48 AM	Bypass valve opened
8/19/2010	11:22:48 AM	Helium MFC set to  0.000000
8/19/2010	11:22:48 AM	H2 MFC set to  0.000000
8/19/2010	11:22:48 AM	BCl3 MFC set to  0.000000
8/19/2010	11:22:48 AM	PHl3 MFC set to  0.000000
8/19/2010	11:22:48 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:22:48 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:22:48 AM	Tube furnace set to 0
8/19/2010	11:23:48 AM	H2 valve closed
8/19/2010	11:23:48 AM	BCl3 valve closed
8/19/2010	11:23:48 AM	PH3 valve closed
8/19/2010	11:23:48 AM	SiCl4 pre valve closed
8/19/2010	11:23:48 AM	SiCl4 post valve closed
8/19/2010	11:23:48 AM	Bubbler valve closed
8/19/2010	11:23:48 AM	Helium valve opened
8/19/2010	11:23:48 AM	Main Vac valve opened
8/19/2010	11:23:48 AM	Bypass valve opened
8/19/2010	11:23:48 AM	Helium MFC set to  100.000000
8/19/2010	11:23:48 AM	H2 MFC set to  0.000000
8/19/2010	11:23:48 AM	BCl3 MFC set to  0.000000
8/19/2010	11:23:48 AM	PHl3 MFC set to  0.000000
8/19/2010	11:23:48 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:23:48 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:23:48 AM	Tube furnace set to 0
8/19/2010	11:32:48 AM	Helium valve closed
8/19/2010	11:32:48 AM	H2 valve closed
8/19/2010	11:32:48 AM	BCl3 valve closed
8/19/2010	11:32:48 AM	PH3 valve closed
8/19/2010	11:32:48 AM	SiCl4 pre valve closed
8/19/2010	11:32:48 AM	SiCl4 post valve closed
8/19/2010	11:32:48 AM	Bubbler valve closed
8/19/2010	11:32:48 AM	Main Vac valve opened
8/19/2010	11:32:48 AM	Bypass valve opened
8/19/2010	11:32:48 AM	Helium MFC set to  0.000000
8/19/2010	11:32:48 AM	H2 MFC set to  0.000000
8/19/2010	11:32:48 AM	BCl3 MFC set to  0.000000
8/19/2010	11:32:48 AM	PHl3 MFC set to  0.000000
8/19/2010	11:32:48 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:32:48 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:32:48 AM	Tube furnace set to 0
8/19/2010	11:33:48 AM	H2 valve closed
8/19/2010	11:33:48 AM	BCl3 valve closed
8/19/2010	11:33:48 AM	PH3 valve closed
8/19/2010	11:33:48 AM	SiCl4 pre valve closed
8/19/2010	11:33:48 AM	SiCl4 post valve closed
8/19/2010	11:33:48 AM	Bubbler valve closed
8/19/2010	11:33:48 AM	Helium valve opened
8/19/2010	11:33:48 AM	Main Vac valve opened
8/19/2010	11:33:48 AM	Bypass valve opened
8/19/2010	11:33:48 AM	Helium MFC set to  100.000000
8/19/2010	11:33:48 AM	H2 MFC set to  0.000000
8/19/2010	11:33:48 AM	BCl3 MFC set to  0.000000
8/19/2010	11:33:48 AM	PHl3 MFC set to  0.000000
8/19/2010	11:33:48 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:33:48 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:33:49 AM	Tube furnace set to 0
8/19/2010	11:42:49 AM	Helium valve closed
8/19/2010	11:42:49 AM	H2 valve closed
8/19/2010	11:42:49 AM	BCl3 valve closed
8/19/2010	11:42:49 AM	PH3 valve closed
8/19/2010	11:42:49 AM	SiCl4 pre valve closed
8/19/2010	11:42:49 AM	SiCl4 post valve closed
8/19/2010	11:42:49 AM	Bubbler valve closed
8/19/2010	11:42:49 AM	Main Vac valve opened
8/19/2010	11:42:49 AM	Bypass valve opened
8/19/2010	11:42:49 AM	Helium MFC set to  0.000000
8/19/2010	11:42:49 AM	H2 MFC set to  0.000000
8/19/2010	11:42:49 AM	BCl3 MFC set to  0.000000
8/19/2010	11:42:49 AM	PHl3 MFC set to  0.000000
8/19/2010	11:42:49 AM	SiCl4 MFC set to  0.000000
8/19/2010	11:42:49 AM	Bypass solenoid MFC set to  0.000000
8/19/2010	11:42:49 AM	Tube furnace set to 0
8/19/2010	11:42:50 AM	Run finished at 11:42 AM
8/19/2010	11:42:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	11:55:54 AM	Main Vac valve closed
8/19/2010	11:55:56 AM	Bypass valve closed
8/19/2010	11:56:09 AM	Bypass valve opened
8/19/2010	11:56:13 AM	Main Vac valve opened
8/19/2010	12:01:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	12:01:18 PM	Recipe started at 12:01 PM
8/19/2010	12:01:18 PM	Helium valve closed
8/19/2010	12:01:18 PM	H2 valve closed
8/19/2010	12:01:18 PM	BCl3 valve closed
8/19/2010	12:01:18 PM	PH3 valve closed
8/19/2010	12:01:18 PM	SiCl4 pre valve closed
8/19/2010	12:01:18 PM	SiCl4 post valve closed
8/19/2010	12:01:18 PM	Main Vac valve closed
8/19/2010	12:01:18 PM	Bubbler valve closed
8/19/2010	12:01:18 PM	Bypass valve opened
8/19/2010	12:01:18 PM	Helium MFC set to  0.000000
8/19/2010	12:01:18 PM	H2 MFC set to  0.000000
8/19/2010	12:01:18 PM	BCl3 MFC set to  0.000000
8/19/2010	12:01:18 PM	PHl3 MFC set to  0.000000
8/19/2010	12:01:18 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:01:18 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:01:18 PM	Tube furnace set to 0
8/19/2010	12:01:19 PM	Helium valve closed
8/19/2010	12:01:19 PM	H2 valve closed
8/19/2010	12:01:19 PM	BCl3 valve closed
8/19/2010	12:01:19 PM	PH3 valve closed
8/19/2010	12:01:19 PM	SiCl4 pre valve closed
8/19/2010	12:01:19 PM	SiCl4 post valve closed
8/19/2010	12:01:19 PM	Bubbler valve closed
8/19/2010	12:01:19 PM	Main Vac valve opened
8/19/2010	12:01:19 PM	Bypass valve opened
8/19/2010	12:01:19 PM	Helium MFC set to  0.000000
8/19/2010	12:01:19 PM	H2 MFC set to  0.000000
8/19/2010	12:01:19 PM	BCl3 MFC set to  0.000000
8/19/2010	12:01:19 PM	PHl3 MFC set to  0.000000
8/19/2010	12:01:19 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:01:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:01:19 PM	Tube furnace set to 0
8/19/2010	12:02:19 PM	H2 valve closed
8/19/2010	12:02:19 PM	BCl3 valve closed
8/19/2010	12:02:19 PM	PH3 valve closed
8/19/2010	12:02:19 PM	SiCl4 pre valve closed
8/19/2010	12:02:19 PM	SiCl4 post valve closed
8/19/2010	12:02:19 PM	Bubbler valve closed
8/19/2010	12:02:19 PM	Helium valve opened
8/19/2010	12:02:19 PM	Main Vac valve opened
8/19/2010	12:02:19 PM	Bypass valve opened
8/19/2010	12:02:19 PM	Helium MFC set to  100.000000
8/19/2010	12:02:19 PM	H2 MFC set to  0.000000
8/19/2010	12:02:19 PM	BCl3 MFC set to  0.000000
8/19/2010	12:02:19 PM	PHl3 MFC set to  0.000000
8/19/2010	12:02:19 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:02:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:02:19 PM	Tube furnace set to 0
8/19/2010	12:11:19 PM	Helium valve closed
8/19/2010	12:11:19 PM	H2 valve closed
8/19/2010	12:11:19 PM	BCl3 valve closed
8/19/2010	12:11:19 PM	PH3 valve closed
8/19/2010	12:11:19 PM	SiCl4 pre valve closed
8/19/2010	12:11:19 PM	SiCl4 post valve closed
8/19/2010	12:11:19 PM	Bubbler valve closed
8/19/2010	12:11:19 PM	Main Vac valve opened
8/19/2010	12:11:19 PM	Bypass valve opened
8/19/2010	12:11:19 PM	Helium MFC set to  0.000000
8/19/2010	12:11:19 PM	H2 MFC set to  0.000000
8/19/2010	12:11:19 PM	BCl3 MFC set to  0.000000
8/19/2010	12:11:19 PM	PHl3 MFC set to  0.000000
8/19/2010	12:11:19 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:11:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:11:19 PM	Tube furnace set to 0
8/19/2010	12:12:19 PM	H2 valve closed
8/19/2010	12:12:19 PM	BCl3 valve closed
8/19/2010	12:12:19 PM	PH3 valve closed
8/19/2010	12:12:19 PM	SiCl4 pre valve closed
8/19/2010	12:12:19 PM	SiCl4 post valve closed
8/19/2010	12:12:19 PM	Bubbler valve closed
8/19/2010	12:12:19 PM	Helium valve opened
8/19/2010	12:12:19 PM	Main Vac valve opened
8/19/2010	12:12:19 PM	Bypass valve opened
8/19/2010	12:12:19 PM	Helium MFC set to  100.000000
8/19/2010	12:12:19 PM	H2 MFC set to  0.000000
8/19/2010	12:12:19 PM	BCl3 MFC set to  0.000000
8/19/2010	12:12:19 PM	PHl3 MFC set to  0.000000
8/19/2010	12:12:19 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:12:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:12:19 PM	Tube furnace set to 0
8/19/2010	12:21:19 PM	Helium valve closed
8/19/2010	12:21:19 PM	H2 valve closed
8/19/2010	12:21:19 PM	BCl3 valve closed
8/19/2010	12:21:19 PM	PH3 valve closed
8/19/2010	12:21:19 PM	SiCl4 pre valve closed
8/19/2010	12:21:19 PM	SiCl4 post valve closed
8/19/2010	12:21:19 PM	Bubbler valve closed
8/19/2010	12:21:20 PM	Main Vac valve opened
8/19/2010	12:21:20 PM	Bypass valve opened
8/19/2010	12:21:20 PM	Helium MFC set to  0.000000
8/19/2010	12:21:20 PM	H2 MFC set to  0.000000
8/19/2010	12:21:20 PM	BCl3 MFC set to  0.000000
8/19/2010	12:21:20 PM	PHl3 MFC set to  0.000000
8/19/2010	12:21:20 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:21:20 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:21:20 PM	Tube furnace set to 0
8/19/2010	12:22:20 PM	H2 valve closed
8/19/2010	12:22:20 PM	BCl3 valve closed
8/19/2010	12:22:20 PM	PH3 valve closed
8/19/2010	12:22:20 PM	SiCl4 pre valve closed
8/19/2010	12:22:20 PM	SiCl4 post valve closed
8/19/2010	12:22:20 PM	Bubbler valve closed
8/19/2010	12:22:20 PM	Helium valve opened
8/19/2010	12:22:20 PM	Main Vac valve opened
8/19/2010	12:22:20 PM	Bypass valve opened
8/19/2010	12:22:20 PM	Helium MFC set to  100.000000
8/19/2010	12:22:20 PM	H2 MFC set to  0.000000
8/19/2010	12:22:20 PM	BCl3 MFC set to  0.000000
8/19/2010	12:22:20 PM	PHl3 MFC set to  0.000000
8/19/2010	12:22:20 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:22:20 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:22:20 PM	Tube furnace set to 0
8/19/2010	12:31:20 PM	Helium valve closed
8/19/2010	12:31:20 PM	H2 valve closed
8/19/2010	12:31:20 PM	BCl3 valve closed
8/19/2010	12:31:20 PM	PH3 valve closed
8/19/2010	12:31:20 PM	SiCl4 pre valve closed
8/19/2010	12:31:20 PM	SiCl4 post valve closed
8/19/2010	12:31:20 PM	Bubbler valve closed
8/19/2010	12:31:20 PM	Main Vac valve opened
8/19/2010	12:31:20 PM	Bypass valve opened
8/19/2010	12:31:20 PM	Helium MFC set to  0.000000
8/19/2010	12:31:20 PM	H2 MFC set to  0.000000
8/19/2010	12:31:20 PM	BCl3 MFC set to  0.000000
8/19/2010	12:31:20 PM	PHl3 MFC set to  0.000000
8/19/2010	12:31:20 PM	SiCl4 MFC set to  0.000000
8/19/2010	12:31:20 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	12:31:20 PM	Tube furnace set to 0
8/19/2010	12:31:21 PM	Run finished at 12:31 PM
8/19/2010	12:31:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	12:43:20 PM	Main Vac valve closed
8/19/2010	12:43:22 PM	Bypass valve closed
8/19/2010	12:43:29 PM	Helium valve opened
8/19/2010	12:43:34 PM	Helium MFC set to  100.000000
8/19/2010	12:43:43 PM	Helium valve closed
8/19/2010	12:43:54 PM	Bypass valve opened
8/19/2010	12:43:59 PM	Main Vac valve opened
8/19/2010	1:35:05 PM	Main Vac valve closed
8/19/2010	1:35:06 PM	Bypass valve closed
8/19/2010	1:35:30 PM	Bypass valve opened
8/19/2010	1:35:39 PM	Main Vac valve opened
8/19/2010	1:39:51 PM	Recipe started at 1:39 PM
8/19/2010	1:39:51 PM	Helium valve closed
8/19/2010	1:39:51 PM	BCl3 valve closed
8/19/2010	1:39:51 PM	PH3 valve closed
8/19/2010	1:39:51 PM	SiCl4 pre valve closed
8/19/2010	1:39:51 PM	SiCl4 post valve closed
8/19/2010	1:39:51 PM	Main Vac valve closed
8/19/2010	1:39:51 PM	Bypass valve closed
8/19/2010	1:39:51 PM	Bubbler valve closed
8/19/2010	1:39:51 PM	H2 valve opened
8/19/2010	1:39:51 PM	Helium MFC set to  0.000000
8/19/2010	1:39:51 PM	H2 MFC set to  500.000000
8/19/2010	1:39:51 PM	BCl3 MFC set to  0.000000
8/19/2010	1:39:51 PM	PHl3 MFC set to  0.000000
8/19/2010	1:39:51 PM	SiCl4 MFC set to  0.000000
8/19/2010	1:39:51 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	1:39:51 PM	Tube furnace set to 1000
8/19/2010	1:41:12 PM	Helium valve closed
8/19/2010	1:41:12 PM	BCl3 valve closed
8/19/2010	1:41:12 PM	PH3 valve closed
8/19/2010	1:41:12 PM	SiCl4 pre valve closed
8/19/2010	1:41:12 PM	SiCl4 post valve closed
8/19/2010	1:41:12 PM	Main Vac valve closed
8/19/2010	1:41:12 PM	Bypass valve closed
8/19/2010	1:41:12 PM	H2 valve opened
8/19/2010	1:41:12 PM	Bubbler valve opened
8/19/2010	1:41:12 PM	Helium MFC set to  0.000000
8/19/2010	1:41:12 PM	H2 MFC set to  500.000000
8/19/2010	1:41:12 PM	BCl3 MFC set to  0.000000
8/19/2010	1:41:12 PM	PHl3 MFC set to  0.000000
8/19/2010	1:41:12 PM	SiCl4 MFC set to  0.000000
8/19/2010	1:41:12 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	1:41:13 PM	Tube furnace set to 1000
8/19/2010	2:01:12 PM	Helium valve closed
8/19/2010	2:01:12 PM	PH3 valve closed
8/19/2010	2:01:12 PM	Main Vac valve closed
8/19/2010	2:01:12 PM	Bypass valve closed
8/19/2010	2:01:13 PM	H2 valve opened
8/19/2010	2:01:13 PM	BCl3 valve opened
8/19/2010	2:01:13 PM	SiCl4 pre valve opened
8/19/2010	2:01:13 PM	SiCl4 post valve opened
8/19/2010	2:01:13 PM	Bubbler valve opened
8/19/2010	2:01:13 PM	Helium MFC set to  0.000000
8/19/2010	2:01:13 PM	H2 MFC set to  500.000000
8/19/2010	2:01:13 PM	BCl3 MFC set to  15.000000
8/19/2010	2:01:13 PM	PHl3 MFC set to  0.000000
8/19/2010	2:01:13 PM	SiCl4 MFC set to  50.000000
8/19/2010	2:01:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:01:13 PM	Tube furnace set to 1000
8/19/2010	2:21:13 PM	BCl3 valve closed
8/19/2010	2:21:13 PM	PH3 valve closed
8/19/2010	2:21:13 PM	SiCl4 pre valve closed
8/19/2010	2:21:13 PM	SiCl4 post valve closed
8/19/2010	2:21:13 PM	Main Vac valve closed
8/19/2010	2:21:13 PM	Bypass valve closed
8/19/2010	2:21:13 PM	Helium valve opened
8/19/2010	2:21:13 PM	H2 valve opened
8/19/2010	2:21:13 PM	Bubbler valve opened
8/19/2010	2:21:13 PM	Helium MFC set to  250.000000
8/19/2010	2:21:13 PM	H2 MFC set to  250.000000
8/19/2010	2:21:13 PM	BCl3 MFC set to  0.000000
8/19/2010	2:21:13 PM	PHl3 MFC set to  0.000000
8/19/2010	2:21:13 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:21:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:21:13 PM	Tube furnace set to 0
8/19/2010	2:33:55 PM	Helium valve closed
8/19/2010	2:33:55 PM	H2 valve closed
8/19/2010	2:33:55 PM	BCl3 valve closed
8/19/2010	2:33:55 PM	PH3 valve closed
8/19/2010	2:33:55 PM	SiCl4 pre valve closed
8/19/2010	2:33:55 PM	SiCl4 post valve closed
8/19/2010	2:33:55 PM	Main Vac valve closed
8/19/2010	2:33:55 PM	Bubbler valve closed
8/19/2010	2:33:55 PM	Bypass valve closed
8/19/2010	2:33:55 PM	Helium MFC set to  0.000000
8/19/2010	2:33:55 PM	H2 MFC set to  0.000000
8/19/2010	2:33:55 PM	BCl3 MFC set to  0.000000
8/19/2010	2:33:55 PM	PHl3 MFC set to  0.000000
8/19/2010	2:33:55 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:33:55 PM	Bypass solenoid MFC set to  760.000000
8/19/2010	2:33:55 PM	Tube furnace set to 0
8/19/2010	2:33:55 PM	Baratron reads 747.443289 Torr and NaOH valve is open.  Emergency exit.
8/19/2010	2:34:05 PM	Run aborted at 2:34 PM
8/19/2010	2:41:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	2:41:29 PM	Recipe started at 2:41 PM
8/19/2010	2:41:29 PM	Helium valve closed
8/19/2010	2:41:29 PM	H2 valve closed
8/19/2010	2:41:29 PM	BCl3 valve closed
8/19/2010	2:41:29 PM	PH3 valve closed
8/19/2010	2:41:29 PM	SiCl4 pre valve closed
8/19/2010	2:41:29 PM	SiCl4 post valve closed
8/19/2010	2:41:29 PM	Main Vac valve closed
8/19/2010	2:41:29 PM	Bubbler valve closed
8/19/2010	2:41:29 PM	Bypass valve opened
8/19/2010	2:41:29 PM	Helium MFC set to  0.000000
8/19/2010	2:41:29 PM	H2 MFC set to  0.000000
8/19/2010	2:41:29 PM	BCl3 MFC set to  0.000000
8/19/2010	2:41:29 PM	PHl3 MFC set to  0.000000
8/19/2010	2:41:29 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:41:29 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:41:29 PM	Tube furnace set to 0
8/19/2010	2:46:38 PM	Run aborted at 2:46 PM
8/19/2010	2:46:38 PM	Helium valve closed
8/19/2010	2:46:38 PM	H2 valve closed
8/19/2010	2:46:38 PM	BCl3 valve closed
8/19/2010	2:46:38 PM	PH3 valve closed
8/19/2010	2:46:38 PM	SiCl4 pre valve closed
8/19/2010	2:46:38 PM	SiCl4 post valve closed
8/19/2010	2:46:38 PM	Bypass valve closed
8/19/2010	2:46:38 PM	Main Vac valve closed
8/19/2010	2:46:38 PM	Bubbler valve closed
8/19/2010	2:46:38 PM	Helium MFC set to  0.000000
8/19/2010	2:46:38 PM	H2 MFC set to  0.000000
8/19/2010	2:46:38 PM	BCl3 MFC set to  0.000000
8/19/2010	2:46:38 PM	PHl3 MFC set to  0.000000
8/19/2010	2:46:38 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:46:38 PM	Tube furnace set to 0
8/19/2010	2:46:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	2:46:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	2:46:53 PM	Recipe started at 2:46 PM
8/19/2010	2:46:53 PM	H2 valve closed
8/19/2010	2:46:53 PM	BCl3 valve closed
8/19/2010	2:46:53 PM	PH3 valve closed
8/19/2010	2:46:53 PM	SiCl4 pre valve closed
8/19/2010	2:46:53 PM	SiCl4 post valve closed
8/19/2010	2:46:53 PM	Main Vac valve closed
8/19/2010	2:46:53 PM	Bypass valve closed
8/19/2010	2:46:53 PM	Bubbler valve closed
8/19/2010	2:46:53 PM	Helium valve opened
8/19/2010	2:46:53 PM	Helium MFC set to  500.000000
8/19/2010	2:46:53 PM	H2 MFC set to  0.000000
8/19/2010	2:46:53 PM	BCl3 MFC set to  0.000000
8/19/2010	2:46:53 PM	PHl3 MFC set to  0.000000
8/19/2010	2:46:53 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:46:53 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:46:53 PM	Tube furnace set to 0
8/19/2010	2:47:01 PM	Helium valve closed
8/19/2010	2:47:01 PM	H2 valve closed
8/19/2010	2:47:01 PM	BCl3 valve closed
8/19/2010	2:47:01 PM	PH3 valve closed
8/19/2010	2:47:01 PM	SiCl4 pre valve closed
8/19/2010	2:47:01 PM	SiCl4 post valve closed
8/19/2010	2:47:01 PM	Main Vac valve closed
8/19/2010	2:47:01 PM	Bypass valve closed
8/19/2010	2:47:01 PM	Bubbler valve closed
8/19/2010	2:47:01 PM	Helium MFC set to  0.000000
8/19/2010	2:47:01 PM	H2 MFC set to  0.000000
8/19/2010	2:47:01 PM	BCl3 MFC set to  0.000000
8/19/2010	2:47:01 PM	PHl3 MFC set to  0.000000
8/19/2010	2:47:01 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:47:01 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:47:02 PM	Tube furnace set to 0
8/19/2010	2:47:02 PM	Run finished at 2:47 PM
8/19/2010	2:47:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	2:48:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	2:48:39 PM	Recipe started at 2:48 PM
8/19/2010	2:48:39 PM	Helium valve closed
8/19/2010	2:48:39 PM	H2 valve closed
8/19/2010	2:48:39 PM	BCl3 valve closed
8/19/2010	2:48:39 PM	PH3 valve closed
8/19/2010	2:48:39 PM	SiCl4 pre valve closed
8/19/2010	2:48:39 PM	SiCl4 post valve closed
8/19/2010	2:48:39 PM	Main Vac valve closed
8/19/2010	2:48:39 PM	Bubbler valve closed
8/19/2010	2:48:39 PM	Bypass valve opened
8/19/2010	2:48:39 PM	Helium MFC set to  0.000000
8/19/2010	2:48:39 PM	H2 MFC set to  0.000000
8/19/2010	2:48:39 PM	BCl3 MFC set to  0.000000
8/19/2010	2:48:39 PM	PHl3 MFC set to  0.000000
8/19/2010	2:48:39 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:48:39 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:48:39 PM	Tube furnace set to 0
8/19/2010	2:51:10 PM	Helium valve closed
8/19/2010	2:51:10 PM	H2 valve closed
8/19/2010	2:51:10 PM	BCl3 valve closed
8/19/2010	2:51:10 PM	PH3 valve closed
8/19/2010	2:51:10 PM	SiCl4 pre valve closed
8/19/2010	2:51:10 PM	SiCl4 post valve closed
8/19/2010	2:51:10 PM	Bubbler valve closed
8/19/2010	2:51:10 PM	Main Vac valve opened
8/19/2010	2:51:10 PM	Bypass valve opened
8/19/2010	2:51:10 PM	Helium MFC set to  0.000000
8/19/2010	2:51:10 PM	H2 MFC set to  0.000000
8/19/2010	2:51:10 PM	BCl3 MFC set to  0.000000
8/19/2010	2:51:10 PM	PHl3 MFC set to  0.000000
8/19/2010	2:51:10 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:51:10 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:51:10 PM	Tube furnace set to 0
8/19/2010	2:51:11 PM	Run finished at 2:51 PM
8/19/2010	2:51:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	2:51:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	2:51:56 PM	Recipe started at 2:51 PM
8/19/2010	2:51:56 PM	H2 valve closed
8/19/2010	2:51:56 PM	BCl3 valve closed
8/19/2010	2:51:56 PM	PH3 valve closed
8/19/2010	2:51:56 PM	SiCl4 pre valve closed
8/19/2010	2:51:56 PM	SiCl4 post valve closed
8/19/2010	2:51:56 PM	Main Vac valve closed
8/19/2010	2:51:56 PM	Bypass valve closed
8/19/2010	2:51:56 PM	Bubbler valve closed
8/19/2010	2:51:56 PM	Helium valve opened
8/19/2010	2:51:56 PM	Helium MFC set to  500.000000
8/19/2010	2:51:56 PM	H2 MFC set to  0.000000
8/19/2010	2:51:56 PM	BCl3 MFC set to  0.000000
8/19/2010	2:51:56 PM	PHl3 MFC set to  0.000000
8/19/2010	2:51:56 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:51:56 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:51:56 PM	Tube furnace set to 0
8/19/2010	2:53:11 PM	Helium valve closed
8/19/2010	2:53:11 PM	H2 valve closed
8/19/2010	2:53:11 PM	BCl3 valve closed
8/19/2010	2:53:11 PM	PH3 valve closed
8/19/2010	2:53:11 PM	SiCl4 pre valve closed
8/19/2010	2:53:11 PM	SiCl4 post valve closed
8/19/2010	2:53:11 PM	Main Vac valve closed
8/19/2010	2:53:11 PM	Bypass valve closed
8/19/2010	2:53:11 PM	Bubbler valve closed
8/19/2010	2:53:11 PM	Helium MFC set to  0.000000
8/19/2010	2:53:11 PM	H2 MFC set to  0.000000
8/19/2010	2:53:11 PM	BCl3 MFC set to  0.000000
8/19/2010	2:53:11 PM	PHl3 MFC set to  0.000000
8/19/2010	2:53:11 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:53:11 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:53:11 PM	Tube furnace set to 0
8/19/2010	2:53:26 PM	Helium valve closed
8/19/2010	2:53:26 PM	H2 valve closed
8/19/2010	2:53:26 PM	BCl3 valve closed
8/19/2010	2:53:26 PM	PH3 valve closed
8/19/2010	2:53:26 PM	SiCl4 pre valve closed
8/19/2010	2:53:26 PM	SiCl4 post valve closed
8/19/2010	2:53:26 PM	Main Vac valve closed
8/19/2010	2:53:26 PM	Bubbler valve closed
8/19/2010	2:53:26 PM	Bypass valve opened
8/19/2010	2:53:26 PM	Helium MFC set to  0.000000
8/19/2010	2:53:26 PM	H2 MFC set to  0.000000
8/19/2010	2:53:26 PM	BCl3 MFC set to  0.000000
8/19/2010	2:53:26 PM	PHl3 MFC set to  0.000000
8/19/2010	2:53:26 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:53:26 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:53:26 PM	Tube furnace set to 0
8/19/2010	2:55:51 PM	Run aborted at 2:55 PM
8/19/2010	2:55:51 PM	Helium valve closed
8/19/2010	2:55:51 PM	H2 valve closed
8/19/2010	2:55:51 PM	BCl3 valve closed
8/19/2010	2:55:51 PM	PH3 valve closed
8/19/2010	2:55:51 PM	SiCl4 pre valve closed
8/19/2010	2:55:51 PM	SiCl4 post valve closed
8/19/2010	2:55:51 PM	Bypass valve closed
8/19/2010	2:55:51 PM	Main Vac valve closed
8/19/2010	2:55:51 PM	Bubbler valve closed
8/19/2010	2:55:51 PM	Helium MFC set to  0.000000
8/19/2010	2:55:51 PM	H2 MFC set to  0.000000
8/19/2010	2:55:51 PM	BCl3 MFC set to  0.000000
8/19/2010	2:55:51 PM	PHl3 MFC set to  0.000000
8/19/2010	2:55:51 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:55:51 PM	Tube furnace set to 0
8/19/2010	2:55:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	2:55:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	2:55:53 PM	Recipe started at 2:55 PM
8/19/2010	2:55:53 PM	H2 valve closed
8/19/2010	2:55:53 PM	BCl3 valve closed
8/19/2010	2:55:53 PM	PH3 valve closed
8/19/2010	2:55:53 PM	SiCl4 pre valve closed
8/19/2010	2:55:53 PM	SiCl4 post valve closed
8/19/2010	2:55:53 PM	Main Vac valve closed
8/19/2010	2:55:53 PM	Bypass valve closed
8/19/2010	2:55:53 PM	Bubbler valve closed
8/19/2010	2:55:53 PM	Helium valve opened
8/19/2010	2:55:53 PM	Helium MFC set to  500.000000
8/19/2010	2:55:53 PM	H2 MFC set to  0.000000
8/19/2010	2:55:53 PM	BCl3 MFC set to  0.000000
8/19/2010	2:55:53 PM	PHl3 MFC set to  0.000000
8/19/2010	2:55:53 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:55:53 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:55:53 PM	Tube furnace set to 0
8/19/2010	2:56:55 PM	Helium valve closed
8/19/2010	2:56:55 PM	H2 valve closed
8/19/2010	2:56:55 PM	BCl3 valve closed
8/19/2010	2:56:55 PM	PH3 valve closed
8/19/2010	2:56:55 PM	SiCl4 pre valve closed
8/19/2010	2:56:55 PM	SiCl4 post valve closed
8/19/2010	2:56:55 PM	Main Vac valve closed
8/19/2010	2:56:55 PM	Bypass valve closed
8/19/2010	2:56:55 PM	Bubbler valve closed
8/19/2010	2:56:55 PM	Helium MFC set to  0.000000
8/19/2010	2:56:55 PM	H2 MFC set to  0.000000
8/19/2010	2:56:55 PM	BCl3 MFC set to  0.000000
8/19/2010	2:56:55 PM	PHl3 MFC set to  0.000000
8/19/2010	2:56:55 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:56:55 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:56:55 PM	Tube furnace set to 0
8/19/2010	2:56:55 PM	Run finished at 2:56 PM
8/19/2010	2:56:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	2:58:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	2:58:19 PM	Recipe started at 2:58 PM
8/19/2010	2:58:19 PM	Helium valve closed
8/19/2010	2:58:19 PM	H2 valve closed
8/19/2010	2:58:19 PM	BCl3 valve closed
8/19/2010	2:58:19 PM	PH3 valve closed
8/19/2010	2:58:19 PM	SiCl4 pre valve closed
8/19/2010	2:58:19 PM	SiCl4 post valve closed
8/19/2010	2:58:19 PM	Main Vac valve closed
8/19/2010	2:58:19 PM	Bubbler valve closed
8/19/2010	2:58:19 PM	Bypass valve opened
8/19/2010	2:58:19 PM	Helium MFC set to  0.000000
8/19/2010	2:58:19 PM	H2 MFC set to  0.000000
8/19/2010	2:58:19 PM	BCl3 MFC set to  0.000000
8/19/2010	2:58:19 PM	PHl3 MFC set to  0.000000
8/19/2010	2:58:19 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:58:19 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:58:19 PM	Tube furnace set to 0
8/19/2010	2:58:53 PM	Helium valve closed
8/19/2010	2:58:53 PM	H2 valve closed
8/19/2010	2:58:53 PM	BCl3 valve closed
8/19/2010	2:58:53 PM	PH3 valve closed
8/19/2010	2:58:53 PM	SiCl4 pre valve closed
8/19/2010	2:58:53 PM	SiCl4 post valve closed
8/19/2010	2:58:53 PM	Bubbler valve closed
8/19/2010	2:58:53 PM	Main Vac valve opened
8/19/2010	2:58:53 PM	Bypass valve opened
8/19/2010	2:58:53 PM	Helium MFC set to  0.000000
8/19/2010	2:58:53 PM	H2 MFC set to  0.000000
8/19/2010	2:58:53 PM	BCl3 MFC set to  0.000000
8/19/2010	2:58:53 PM	PHl3 MFC set to  0.000000
8/19/2010	2:58:53 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:58:53 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:58:53 PM	Tube furnace set to 0
8/19/2010	2:58:53 PM	Run finished at 2:58 PM
8/19/2010	2:58:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	2:59:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	2:59:48 PM	Recipe started at 2:59 PM
8/19/2010	2:59:48 PM	H2 valve closed
8/19/2010	2:59:48 PM	BCl3 valve closed
8/19/2010	2:59:48 PM	PH3 valve closed
8/19/2010	2:59:48 PM	SiCl4 pre valve closed
8/19/2010	2:59:48 PM	SiCl4 post valve closed
8/19/2010	2:59:48 PM	Main Vac valve closed
8/19/2010	2:59:48 PM	Bypass valve closed
8/19/2010	2:59:48 PM	Bubbler valve closed
8/19/2010	2:59:48 PM	Helium valve opened
8/19/2010	2:59:48 PM	Helium MFC set to  500.000000
8/19/2010	2:59:48 PM	H2 MFC set to  0.000000
8/19/2010	2:59:48 PM	BCl3 MFC set to  0.000000
8/19/2010	2:59:48 PM	PHl3 MFC set to  0.000000
8/19/2010	2:59:48 PM	SiCl4 MFC set to  0.000000
8/19/2010	2:59:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	2:59:48 PM	Tube furnace set to 0
8/19/2010	3:01:08 PM	Helium valve closed
8/19/2010	3:01:08 PM	H2 valve closed
8/19/2010	3:01:08 PM	BCl3 valve closed
8/19/2010	3:01:08 PM	PH3 valve closed
8/19/2010	3:01:08 PM	SiCl4 pre valve closed
8/19/2010	3:01:08 PM	SiCl4 post valve closed
8/19/2010	3:01:08 PM	Main Vac valve closed
8/19/2010	3:01:08 PM	Bypass valve closed
8/19/2010	3:01:08 PM	Bubbler valve closed
8/19/2010	3:01:08 PM	Helium MFC set to  0.000000
8/19/2010	3:01:08 PM	H2 MFC set to  0.000000
8/19/2010	3:01:08 PM	BCl3 MFC set to  0.000000
8/19/2010	3:01:08 PM	PHl3 MFC set to  0.000000
8/19/2010	3:01:08 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:01:08 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:01:09 PM	Tube furnace set to 0
8/19/2010	3:01:24 PM	Helium valve closed
8/19/2010	3:01:24 PM	H2 valve closed
8/19/2010	3:01:24 PM	BCl3 valve closed
8/19/2010	3:01:24 PM	PH3 valve closed
8/19/2010	3:01:24 PM	SiCl4 pre valve closed
8/19/2010	3:01:24 PM	SiCl4 post valve closed
8/19/2010	3:01:24 PM	Main Vac valve closed
8/19/2010	3:01:24 PM	Bubbler valve closed
8/19/2010	3:01:24 PM	Bypass valve opened
8/19/2010	3:01:24 PM	Helium MFC set to  0.000000
8/19/2010	3:01:24 PM	H2 MFC set to  0.000000
8/19/2010	3:01:24 PM	BCl3 MFC set to  0.000000
8/19/2010	3:01:24 PM	PHl3 MFC set to  0.000000
8/19/2010	3:01:24 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:01:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:01:24 PM	Tube furnace set to 0
8/19/2010	3:01:52 PM	Helium valve closed
8/19/2010	3:01:52 PM	H2 valve closed
8/19/2010	3:01:52 PM	BCl3 valve closed
8/19/2010	3:01:52 PM	PH3 valve closed
8/19/2010	3:01:52 PM	SiCl4 pre valve closed
8/19/2010	3:01:52 PM	SiCl4 post valve closed
8/19/2010	3:01:52 PM	Bubbler valve closed
8/19/2010	3:01:52 PM	Main Vac valve opened
8/19/2010	3:01:52 PM	Bypass valve opened
8/19/2010	3:01:52 PM	Helium MFC set to  0.000000
8/19/2010	3:01:52 PM	H2 MFC set to  0.000000
8/19/2010	3:01:52 PM	BCl3 MFC set to  0.000000
8/19/2010	3:01:52 PM	PHl3 MFC set to  0.000000
8/19/2010	3:01:52 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:01:52 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:01:52 PM	Tube furnace set to 0
8/19/2010	3:06:52 PM	H2 valve closed
8/19/2010	3:06:52 PM	BCl3 valve closed
8/19/2010	3:06:52 PM	PH3 valve closed
8/19/2010	3:06:52 PM	SiCl4 pre valve closed
8/19/2010	3:06:52 PM	SiCl4 post valve closed
8/19/2010	3:06:52 PM	Main Vac valve closed
8/19/2010	3:06:52 PM	Bypass valve closed
8/19/2010	3:06:52 PM	Bubbler valve closed
8/19/2010	3:06:52 PM	Helium valve opened
8/19/2010	3:06:52 PM	Helium MFC set to  500.000000
8/19/2010	3:06:52 PM	H2 MFC set to  0.000000
8/19/2010	3:06:52 PM	BCl3 MFC set to  0.000000
8/19/2010	3:06:52 PM	PHl3 MFC set to  0.000000
8/19/2010	3:06:52 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:06:52 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:06:52 PM	Tube furnace set to 0
8/19/2010	3:08:13 PM	Helium valve closed
8/19/2010	3:08:13 PM	H2 valve closed
8/19/2010	3:08:13 PM	BCl3 valve closed
8/19/2010	3:08:13 PM	PH3 valve closed
8/19/2010	3:08:13 PM	SiCl4 pre valve closed
8/19/2010	3:08:13 PM	SiCl4 post valve closed
8/19/2010	3:08:13 PM	Main Vac valve closed
8/19/2010	3:08:13 PM	Bypass valve closed
8/19/2010	3:08:13 PM	Bubbler valve closed
8/19/2010	3:08:13 PM	Helium MFC set to  0.000000
8/19/2010	3:08:13 PM	H2 MFC set to  0.000000
8/19/2010	3:08:13 PM	BCl3 MFC set to  0.000000
8/19/2010	3:08:13 PM	PHl3 MFC set to  0.000000
8/19/2010	3:08:13 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:08:13 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:08:13 PM	Tube furnace set to 0
8/19/2010	3:08:28 PM	Helium valve closed
8/19/2010	3:08:28 PM	H2 valve closed
8/19/2010	3:08:28 PM	BCl3 valve closed
8/19/2010	3:08:28 PM	PH3 valve closed
8/19/2010	3:08:28 PM	SiCl4 pre valve closed
8/19/2010	3:08:28 PM	SiCl4 post valve closed
8/19/2010	3:08:28 PM	Main Vac valve closed
8/19/2010	3:08:28 PM	Bubbler valve closed
8/19/2010	3:08:28 PM	Bypass valve opened
8/19/2010	3:08:28 PM	Helium MFC set to  0.000000
8/19/2010	3:08:28 PM	H2 MFC set to  0.000000
8/19/2010	3:08:28 PM	BCl3 MFC set to  0.000000
8/19/2010	3:08:28 PM	PHl3 MFC set to  0.000000
8/19/2010	3:08:28 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:08:28 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:08:28 PM	Tube furnace set to 0
8/19/2010	3:08:56 PM	Helium valve closed
8/19/2010	3:08:56 PM	H2 valve closed
8/19/2010	3:08:56 PM	BCl3 valve closed
8/19/2010	3:08:56 PM	PH3 valve closed
8/19/2010	3:08:56 PM	SiCl4 pre valve closed
8/19/2010	3:08:56 PM	SiCl4 post valve closed
8/19/2010	3:08:56 PM	Bubbler valve closed
8/19/2010	3:08:56 PM	Main Vac valve opened
8/19/2010	3:08:56 PM	Bypass valve opened
8/19/2010	3:08:56 PM	Helium MFC set to  0.000000
8/19/2010	3:08:57 PM	H2 MFC set to  0.000000
8/19/2010	3:08:57 PM	BCl3 MFC set to  0.000000
8/19/2010	3:08:57 PM	PHl3 MFC set to  0.000000
8/19/2010	3:08:57 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:08:57 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:08:57 PM	Tube furnace set to 0
8/19/2010	3:13:57 PM	H2 valve closed
8/19/2010	3:13:57 PM	BCl3 valve closed
8/19/2010	3:13:57 PM	PH3 valve closed
8/19/2010	3:13:57 PM	SiCl4 pre valve closed
8/19/2010	3:13:57 PM	SiCl4 post valve closed
8/19/2010	3:13:57 PM	Main Vac valve closed
8/19/2010	3:13:57 PM	Bypass valve closed
8/19/2010	3:13:57 PM	Bubbler valve closed
8/19/2010	3:13:57 PM	Helium valve opened
8/19/2010	3:13:57 PM	Helium MFC set to  500.000000
8/19/2010	3:13:57 PM	H2 MFC set to  0.000000
8/19/2010	3:13:57 PM	BCl3 MFC set to  0.000000
8/19/2010	3:13:57 PM	PHl3 MFC set to  0.000000
8/19/2010	3:13:57 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:13:57 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:13:57 PM	Tube furnace set to 0
8/19/2010	3:15:18 PM	Helium valve closed
8/19/2010	3:15:18 PM	H2 valve closed
8/19/2010	3:15:18 PM	BCl3 valve closed
8/19/2010	3:15:18 PM	PH3 valve closed
8/19/2010	3:15:18 PM	SiCl4 pre valve closed
8/19/2010	3:15:18 PM	SiCl4 post valve closed
8/19/2010	3:15:18 PM	Main Vac valve closed
8/19/2010	3:15:18 PM	Bypass valve closed
8/19/2010	3:15:18 PM	Bubbler valve closed
8/19/2010	3:15:18 PM	Helium MFC set to  0.000000
8/19/2010	3:15:18 PM	H2 MFC set to  0.000000
8/19/2010	3:15:18 PM	BCl3 MFC set to  0.000000
8/19/2010	3:15:18 PM	PHl3 MFC set to  0.000000
8/19/2010	3:15:18 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:15:18 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:15:18 PM	Tube furnace set to 0
8/19/2010	3:15:33 PM	Helium valve closed
8/19/2010	3:15:33 PM	H2 valve closed
8/19/2010	3:15:33 PM	BCl3 valve closed
8/19/2010	3:15:33 PM	PH3 valve closed
8/19/2010	3:15:33 PM	SiCl4 pre valve closed
8/19/2010	3:15:33 PM	SiCl4 post valve closed
8/19/2010	3:15:33 PM	Main Vac valve closed
8/19/2010	3:15:33 PM	Bubbler valve closed
8/19/2010	3:15:33 PM	Bypass valve opened
8/19/2010	3:15:33 PM	Helium MFC set to  0.000000
8/19/2010	3:15:33 PM	H2 MFC set to  0.000000
8/19/2010	3:15:33 PM	BCl3 MFC set to  0.000000
8/19/2010	3:15:33 PM	PHl3 MFC set to  0.000000
8/19/2010	3:15:33 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:15:33 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:15:33 PM	Tube furnace set to 0
8/19/2010	3:16:02 PM	Helium valve closed
8/19/2010	3:16:02 PM	H2 valve closed
8/19/2010	3:16:02 PM	BCl3 valve closed
8/19/2010	3:16:02 PM	PH3 valve closed
8/19/2010	3:16:02 PM	SiCl4 pre valve closed
8/19/2010	3:16:02 PM	SiCl4 post valve closed
8/19/2010	3:16:02 PM	Bubbler valve closed
8/19/2010	3:16:02 PM	Main Vac valve opened
8/19/2010	3:16:02 PM	Bypass valve opened
8/19/2010	3:16:02 PM	Helium MFC set to  0.000000
8/19/2010	3:16:02 PM	H2 MFC set to  0.000000
8/19/2010	3:16:02 PM	BCl3 MFC set to  0.000000
8/19/2010	3:16:02 PM	PHl3 MFC set to  0.000000
8/19/2010	3:16:02 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:16:02 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:16:02 PM	Tube furnace set to 0
8/19/2010	3:17:10 PM	Helium valve closed
8/19/2010	3:17:10 PM	H2 valve closed
8/19/2010	3:17:10 PM	BCl3 valve closed
8/19/2010	3:17:10 PM	PH3 valve closed
8/19/2010	3:17:10 PM	SiCl4 pre valve closed
8/19/2010	3:17:10 PM	SiCl4 post valve closed
8/19/2010	3:17:10 PM	Bubbler valve closed
8/19/2010	3:17:10 PM	Main Vac valve opened
8/19/2010	3:17:10 PM	Bypass valve opened
8/19/2010	3:17:10 PM	Helium MFC set to  0.000000
8/19/2010	3:17:10 PM	H2 MFC set to  0.000000
8/19/2010	3:17:10 PM	BCl3 MFC set to  0.000000
8/19/2010	3:17:10 PM	PHl3 MFC set to  0.000000
8/19/2010	3:17:10 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:17:10 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:17:10 PM	Tube furnace set to 0
8/19/2010	3:17:11 PM	Run finished at 3:17 PM
8/19/2010	3:17:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	3:17:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	3:17:17 PM	Recipe started at 3:17 PM
8/19/2010	3:17:17 PM	Helium valve closed
8/19/2010	3:17:17 PM	H2 valve closed
8/19/2010	3:17:17 PM	BCl3 valve closed
8/19/2010	3:17:17 PM	PH3 valve closed
8/19/2010	3:17:17 PM	SiCl4 pre valve closed
8/19/2010	3:17:17 PM	SiCl4 post valve closed
8/19/2010	3:17:17 PM	Main Vac valve closed
8/19/2010	3:17:17 PM	Bubbler valve closed
8/19/2010	3:17:17 PM	Bypass valve opened
8/19/2010	3:17:17 PM	Helium MFC set to  0.000000
8/19/2010	3:17:17 PM	H2 MFC set to  0.000000
8/19/2010	3:17:17 PM	BCl3 MFC set to  0.000000
8/19/2010	3:17:17 PM	PHl3 MFC set to  0.000000
8/19/2010	3:17:17 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:17:17 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:17:17 PM	Tube furnace set to 0
8/19/2010	3:17:17 PM	Helium valve closed
8/19/2010	3:17:17 PM	H2 valve closed
8/19/2010	3:17:17 PM	BCl3 valve closed
8/19/2010	3:17:17 PM	PH3 valve closed
8/19/2010	3:17:17 PM	SiCl4 pre valve closed
8/19/2010	3:17:17 PM	SiCl4 post valve closed
8/19/2010	3:17:17 PM	Bubbler valve closed
8/19/2010	3:17:17 PM	Main Vac valve opened
8/19/2010	3:17:17 PM	Bypass valve opened
8/19/2010	3:17:17 PM	Helium MFC set to  0.000000
8/19/2010	3:17:17 PM	H2 MFC set to  0.000000
8/19/2010	3:17:17 PM	BCl3 MFC set to  0.000000
8/19/2010	3:17:17 PM	PHl3 MFC set to  0.000000
8/19/2010	3:17:17 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:17:17 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:17:18 PM	Tube furnace set to 0
8/19/2010	3:17:24 PM	Run aborted at 3:17 PM
8/19/2010	3:17:24 PM	Helium valve closed
8/19/2010	3:17:24 PM	H2 valve closed
8/19/2010	3:17:24 PM	BCl3 valve closed
8/19/2010	3:17:24 PM	PH3 valve closed
8/19/2010	3:17:24 PM	SiCl4 pre valve closed
8/19/2010	3:17:24 PM	SiCl4 post valve closed
8/19/2010	3:17:24 PM	Bypass valve closed
8/19/2010	3:17:24 PM	Main Vac valve closed
8/19/2010	3:17:24 PM	Bubbler valve closed
8/19/2010	3:17:24 PM	Helium MFC set to  0.000000
8/19/2010	3:17:24 PM	H2 MFC set to  0.000000
8/19/2010	3:17:24 PM	BCl3 MFC set to  0.000000
8/19/2010	3:17:24 PM	PHl3 MFC set to  0.000000
8/19/2010	3:17:24 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:17:24 PM	Tube furnace set to 0
8/19/2010	3:17:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	3:17:26 PM	Main Vac valve opened
8/19/2010	3:17:27 PM	Bypass valve opened
8/19/2010	3:17:38 PM	Main Vac valve closed
8/19/2010	3:17:39 PM	Bypass valve closed
8/19/2010	3:17:58 PM	Main Vac valve opened
8/19/2010	3:17:59 PM	Bypass valve opened
8/19/2010	3:18:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	3:18:06 PM	Recipe started at 3:18 PM
8/19/2010	3:18:06 PM	Helium valve closed
8/19/2010	3:18:06 PM	H2 valve closed
8/19/2010	3:18:06 PM	BCl3 valve closed
8/19/2010	3:18:06 PM	PH3 valve closed
8/19/2010	3:18:06 PM	SiCl4 pre valve closed
8/19/2010	3:18:06 PM	SiCl4 post valve closed
8/19/2010	3:18:06 PM	Main Vac valve closed
8/19/2010	3:18:06 PM	Bubbler valve closed
8/19/2010	3:18:06 PM	Bypass valve opened
8/19/2010	3:18:06 PM	Helium MFC set to  0.000000
8/19/2010	3:18:06 PM	H2 MFC set to  0.000000
8/19/2010	3:18:06 PM	BCl3 MFC set to  0.000000
8/19/2010	3:18:06 PM	PHl3 MFC set to  0.000000
8/19/2010	3:18:06 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:18:06 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:18:06 PM	Tube furnace set to 0
8/19/2010	3:18:07 PM	Helium valve closed
8/19/2010	3:18:07 PM	H2 valve closed
8/19/2010	3:18:07 PM	BCl3 valve closed
8/19/2010	3:18:07 PM	PH3 valve closed
8/19/2010	3:18:07 PM	SiCl4 pre valve closed
8/19/2010	3:18:07 PM	SiCl4 post valve closed
8/19/2010	3:18:07 PM	Bubbler valve closed
8/19/2010	3:18:07 PM	Main Vac valve opened
8/19/2010	3:18:07 PM	Bypass valve opened
8/19/2010	3:18:07 PM	Helium MFC set to  0.000000
8/19/2010	3:18:07 PM	H2 MFC set to  0.000000
8/19/2010	3:18:07 PM	BCl3 MFC set to  0.000000
8/19/2010	3:18:07 PM	PHl3 MFC set to  0.000000
8/19/2010	3:18:07 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:18:07 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:18:07 PM	Tube furnace set to 0
8/19/2010	3:19:07 PM	H2 valve closed
8/19/2010	3:19:07 PM	BCl3 valve closed
8/19/2010	3:19:07 PM	PH3 valve closed
8/19/2010	3:19:07 PM	SiCl4 pre valve closed
8/19/2010	3:19:07 PM	SiCl4 post valve closed
8/19/2010	3:19:07 PM	Bubbler valve closed
8/19/2010	3:19:07 PM	Helium valve opened
8/19/2010	3:19:07 PM	Main Vac valve opened
8/19/2010	3:19:07 PM	Bypass valve opened
8/19/2010	3:19:07 PM	Helium MFC set to  100.000000
8/19/2010	3:19:07 PM	H2 MFC set to  0.000000
8/19/2010	3:19:07 PM	BCl3 MFC set to  0.000000
8/19/2010	3:19:07 PM	PHl3 MFC set to  0.000000
8/19/2010	3:19:07 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:19:07 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:19:07 PM	Tube furnace set to 0
8/19/2010	3:28:07 PM	Helium valve closed
8/19/2010	3:28:07 PM	H2 valve closed
8/19/2010	3:28:07 PM	BCl3 valve closed
8/19/2010	3:28:07 PM	PH3 valve closed
8/19/2010	3:28:07 PM	SiCl4 pre valve closed
8/19/2010	3:28:07 PM	SiCl4 post valve closed
8/19/2010	3:28:07 PM	Bubbler valve closed
8/19/2010	3:28:07 PM	Main Vac valve opened
8/19/2010	3:28:07 PM	Bypass valve opened
8/19/2010	3:28:07 PM	Helium MFC set to  0.000000
8/19/2010	3:28:07 PM	H2 MFC set to  0.000000
8/19/2010	3:28:07 PM	BCl3 MFC set to  0.000000
8/19/2010	3:28:07 PM	PHl3 MFC set to  0.000000
8/19/2010	3:28:07 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:28:07 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:28:07 PM	Tube furnace set to 0
8/19/2010	3:29:07 PM	H2 valve closed
8/19/2010	3:29:07 PM	BCl3 valve closed
8/19/2010	3:29:07 PM	PH3 valve closed
8/19/2010	3:29:07 PM	SiCl4 pre valve closed
8/19/2010	3:29:07 PM	SiCl4 post valve closed
8/19/2010	3:29:07 PM	Bubbler valve closed
8/19/2010	3:29:07 PM	Helium valve opened
8/19/2010	3:29:07 PM	Main Vac valve opened
8/19/2010	3:29:07 PM	Bypass valve opened
8/19/2010	3:29:07 PM	Helium MFC set to  100.000000
8/19/2010	3:29:07 PM	H2 MFC set to  0.000000
8/19/2010	3:29:07 PM	BCl3 MFC set to  0.000000
8/19/2010	3:29:07 PM	PHl3 MFC set to  0.000000
8/19/2010	3:29:07 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:29:07 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:29:07 PM	Tube furnace set to 0
8/19/2010	3:38:07 PM	Helium valve closed
8/19/2010	3:38:07 PM	H2 valve closed
8/19/2010	3:38:07 PM	BCl3 valve closed
8/19/2010	3:38:07 PM	PH3 valve closed
8/19/2010	3:38:07 PM	SiCl4 pre valve closed
8/19/2010	3:38:07 PM	SiCl4 post valve closed
8/19/2010	3:38:07 PM	Bubbler valve closed
8/19/2010	3:38:07 PM	Main Vac valve opened
8/19/2010	3:38:07 PM	Bypass valve opened
8/19/2010	3:38:07 PM	Helium MFC set to  0.000000
8/19/2010	3:38:07 PM	H2 MFC set to  0.000000
8/19/2010	3:38:07 PM	BCl3 MFC set to  0.000000
8/19/2010	3:38:07 PM	PHl3 MFC set to  0.000000
8/19/2010	3:38:07 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:38:07 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:38:08 PM	Tube furnace set to 0
8/19/2010	3:39:08 PM	H2 valve closed
8/19/2010	3:39:08 PM	BCl3 valve closed
8/19/2010	3:39:08 PM	PH3 valve closed
8/19/2010	3:39:08 PM	SiCl4 pre valve closed
8/19/2010	3:39:08 PM	SiCl4 post valve closed
8/19/2010	3:39:08 PM	Bubbler valve closed
8/19/2010	3:39:08 PM	Helium valve opened
8/19/2010	3:39:08 PM	Main Vac valve opened
8/19/2010	3:39:08 PM	Bypass valve opened
8/19/2010	3:39:08 PM	Helium MFC set to  100.000000
8/19/2010	3:39:08 PM	H2 MFC set to  0.000000
8/19/2010	3:39:08 PM	BCl3 MFC set to  0.000000
8/19/2010	3:39:08 PM	PHl3 MFC set to  0.000000
8/19/2010	3:39:08 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:39:08 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:39:08 PM	Tube furnace set to 0
8/19/2010	3:48:08 PM	Helium valve closed
8/19/2010	3:48:08 PM	H2 valve closed
8/19/2010	3:48:08 PM	BCl3 valve closed
8/19/2010	3:48:08 PM	PH3 valve closed
8/19/2010	3:48:08 PM	SiCl4 pre valve closed
8/19/2010	3:48:08 PM	SiCl4 post valve closed
8/19/2010	3:48:08 PM	Bubbler valve closed
8/19/2010	3:48:08 PM	Main Vac valve opened
8/19/2010	3:48:08 PM	Bypass valve opened
8/19/2010	3:48:08 PM	Helium MFC set to  0.000000
8/19/2010	3:48:08 PM	H2 MFC set to  0.000000
8/19/2010	3:48:08 PM	BCl3 MFC set to  0.000000
8/19/2010	3:48:08 PM	PHl3 MFC set to  0.000000
8/19/2010	3:48:08 PM	SiCl4 MFC set to  0.000000
8/19/2010	3:48:08 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	3:48:08 PM	Tube furnace set to 0
8/19/2010	3:48:09 PM	Run finished at 3:48 PM
8/19/2010	3:48:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	4:15:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	4:15:26 PM	Recipe started at 4:15 PM
8/19/2010	4:15:26 PM	Helium valve closed
8/19/2010	4:15:26 PM	H2 valve closed
8/19/2010	4:15:26 PM	BCl3 valve closed
8/19/2010	4:15:26 PM	PH3 valve closed
8/19/2010	4:15:26 PM	SiCl4 pre valve closed
8/19/2010	4:15:26 PM	SiCl4 post valve closed
8/19/2010	4:15:26 PM	Main Vac valve closed
8/19/2010	4:15:26 PM	Bubbler valve closed
8/19/2010	4:15:26 PM	Bypass valve opened
8/19/2010	4:15:26 PM	Helium MFC set to  0.000000
8/19/2010	4:15:26 PM	H2 MFC set to  0.000000
8/19/2010	4:15:26 PM	BCl3 MFC set to  0.000000
8/19/2010	4:15:26 PM	PHl3 MFC set to  0.000000
8/19/2010	4:15:26 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:15:26 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:15:26 PM	Tube furnace set to 0
8/19/2010	4:15:27 PM	Helium valve closed
8/19/2010	4:15:27 PM	H2 valve closed
8/19/2010	4:15:27 PM	BCl3 valve closed
8/19/2010	4:15:27 PM	PH3 valve closed
8/19/2010	4:15:27 PM	SiCl4 pre valve closed
8/19/2010	4:15:27 PM	SiCl4 post valve closed
8/19/2010	4:15:27 PM	Bubbler valve closed
8/19/2010	4:15:27 PM	Main Vac valve opened
8/19/2010	4:15:27 PM	Bypass valve opened
8/19/2010	4:15:27 PM	Helium MFC set to  0.000000
8/19/2010	4:15:27 PM	H2 MFC set to  0.000000
8/19/2010	4:15:27 PM	BCl3 MFC set to  0.000000
8/19/2010	4:15:27 PM	PHl3 MFC set to  0.000000
8/19/2010	4:15:27 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:15:27 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:15:27 PM	Tube furnace set to 0
8/19/2010	4:16:27 PM	H2 valve closed
8/19/2010	4:16:27 PM	BCl3 valve closed
8/19/2010	4:16:27 PM	PH3 valve closed
8/19/2010	4:16:27 PM	SiCl4 pre valve closed
8/19/2010	4:16:27 PM	SiCl4 post valve closed
8/19/2010	4:16:27 PM	Bubbler valve closed
8/19/2010	4:16:27 PM	Helium valve opened
8/19/2010	4:16:27 PM	Main Vac valve opened
8/19/2010	4:16:27 PM	Bypass valve opened
8/19/2010	4:16:27 PM	Helium MFC set to  100.000000
8/19/2010	4:16:27 PM	H2 MFC set to  0.000000
8/19/2010	4:16:27 PM	BCl3 MFC set to  0.000000
8/19/2010	4:16:27 PM	PHl3 MFC set to  0.000000
8/19/2010	4:16:27 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:16:27 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:16:27 PM	Tube furnace set to 0
8/19/2010	4:25:27 PM	Helium valve closed
8/19/2010	4:25:27 PM	H2 valve closed
8/19/2010	4:25:27 PM	BCl3 valve closed
8/19/2010	4:25:27 PM	PH3 valve closed
8/19/2010	4:25:27 PM	SiCl4 pre valve closed
8/19/2010	4:25:27 PM	SiCl4 post valve closed
8/19/2010	4:25:27 PM	Bubbler valve closed
8/19/2010	4:25:27 PM	Main Vac valve opened
8/19/2010	4:25:27 PM	Bypass valve opened
8/19/2010	4:25:27 PM	Helium MFC set to  0.000000
8/19/2010	4:25:27 PM	H2 MFC set to  0.000000
8/19/2010	4:25:27 PM	BCl3 MFC set to  0.000000
8/19/2010	4:25:27 PM	PHl3 MFC set to  0.000000
8/19/2010	4:25:27 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:25:27 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:25:27 PM	Tube furnace set to 0
8/19/2010	4:26:27 PM	H2 valve closed
8/19/2010	4:26:27 PM	BCl3 valve closed
8/19/2010	4:26:27 PM	PH3 valve closed
8/19/2010	4:26:27 PM	SiCl4 pre valve closed
8/19/2010	4:26:27 PM	SiCl4 post valve closed
8/19/2010	4:26:28 PM	Bubbler valve closed
8/19/2010	4:26:28 PM	Helium valve opened
8/19/2010	4:26:28 PM	Main Vac valve opened
8/19/2010	4:26:28 PM	Bypass valve opened
8/19/2010	4:26:28 PM	Helium MFC set to  100.000000
8/19/2010	4:26:28 PM	H2 MFC set to  0.000000
8/19/2010	4:26:28 PM	BCl3 MFC set to  0.000000
8/19/2010	4:26:28 PM	PHl3 MFC set to  0.000000
8/19/2010	4:26:28 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:26:28 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:26:28 PM	Tube furnace set to 0
8/19/2010	4:33:47 PM	Helium valve closed
8/19/2010	4:33:47 PM	H2 valve closed
8/19/2010	4:33:47 PM	BCl3 valve closed
8/19/2010	4:33:47 PM	PH3 valve closed
8/19/2010	4:33:47 PM	SiCl4 pre valve closed
8/19/2010	4:33:47 PM	SiCl4 post valve closed
8/19/2010	4:33:47 PM	Bubbler valve closed
8/19/2010	4:33:47 PM	Main Vac valve opened
8/19/2010	4:33:47 PM	Bypass valve opened
8/19/2010	4:33:47 PM	Helium MFC set to  0.000000
8/19/2010	4:33:47 PM	H2 MFC set to  0.000000
8/19/2010	4:33:47 PM	BCl3 MFC set to  0.000000
8/19/2010	4:33:47 PM	PHl3 MFC set to  0.000000
8/19/2010	4:33:47 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:33:47 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:33:47 PM	Tube furnace set to 0
8/19/2010	4:33:48 PM	H2 valve closed
8/19/2010	4:33:48 PM	BCl3 valve closed
8/19/2010	4:33:48 PM	PH3 valve closed
8/19/2010	4:33:48 PM	SiCl4 pre valve closed
8/19/2010	4:33:48 PM	SiCl4 post valve closed
8/19/2010	4:33:48 PM	Bubbler valve closed
8/19/2010	4:33:48 PM	Helium valve opened
8/19/2010	4:33:48 PM	Main Vac valve opened
8/19/2010	4:33:48 PM	Bypass valve opened
8/19/2010	4:33:48 PM	Helium MFC set to  100.000000
8/19/2010	4:33:48 PM	H2 MFC set to  0.000000
8/19/2010	4:33:48 PM	BCl3 MFC set to  0.000000
8/19/2010	4:33:48 PM	PHl3 MFC set to  0.000000
8/19/2010	4:33:48 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:33:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:33:48 PM	Tube furnace set to 0
8/19/2010	4:33:49 PM	Helium valve closed
8/19/2010	4:33:49 PM	H2 valve closed
8/19/2010	4:33:49 PM	BCl3 valve closed
8/19/2010	4:33:49 PM	PH3 valve closed
8/19/2010	4:33:49 PM	SiCl4 pre valve closed
8/19/2010	4:33:49 PM	SiCl4 post valve closed
8/19/2010	4:33:49 PM	Bubbler valve closed
8/19/2010	4:33:49 PM	Main Vac valve opened
8/19/2010	4:33:49 PM	Bypass valve opened
8/19/2010	4:33:49 PM	Helium MFC set to  0.000000
8/19/2010	4:33:49 PM	H2 MFC set to  0.000000
8/19/2010	4:33:49 PM	BCl3 MFC set to  0.000000
8/19/2010	4:33:49 PM	PHl3 MFC set to  0.000000
8/19/2010	4:33:49 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:33:49 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:33:49 PM	Tube furnace set to 0
8/19/2010	4:33:50 PM	Run finished at 4:33 PM
8/19/2010	4:33:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	4:35:28 PM	Recipe started at 4:35 PM
8/19/2010	4:35:28 PM	Helium valve closed
8/19/2010	4:35:28 PM	BCl3 valve closed
8/19/2010	4:35:28 PM	PH3 valve closed
8/19/2010	4:35:28 PM	SiCl4 pre valve closed
8/19/2010	4:35:28 PM	SiCl4 post valve closed
8/19/2010	4:35:28 PM	Main Vac valve closed
8/19/2010	4:35:28 PM	Bypass valve closed
8/19/2010	4:35:28 PM	Bubbler valve closed
8/19/2010	4:35:28 PM	H2 valve opened
8/19/2010	4:35:28 PM	Helium MFC set to  0.000000
8/19/2010	4:35:28 PM	H2 MFC set to  500.000000
8/19/2010	4:35:28 PM	BCl3 MFC set to  0.000000
8/19/2010	4:35:28 PM	PHl3 MFC set to  0.000000
8/19/2010	4:35:28 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:35:28 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:35:28 PM	Tube furnace set to 1000
8/19/2010	4:36:49 PM	Helium valve closed
8/19/2010	4:36:49 PM	BCl3 valve closed
8/19/2010	4:36:49 PM	PH3 valve closed
8/19/2010	4:36:49 PM	SiCl4 pre valve closed
8/19/2010	4:36:49 PM	SiCl4 post valve closed
8/19/2010	4:36:49 PM	Main Vac valve closed
8/19/2010	4:36:49 PM	Bypass valve closed
8/19/2010	4:36:49 PM	H2 valve opened
8/19/2010	4:36:49 PM	Bubbler valve opened
8/19/2010	4:36:49 PM	Helium MFC set to  0.000000
8/19/2010	4:36:49 PM	H2 MFC set to  500.000000
8/19/2010	4:36:49 PM	BCl3 MFC set to  0.000000
8/19/2010	4:36:49 PM	PHl3 MFC set to  0.000000
8/19/2010	4:36:49 PM	SiCl4 MFC set to  0.000000
8/19/2010	4:36:49 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:36:50 PM	Tube furnace set to 1000
8/19/2010	4:56:50 PM	Helium valve closed
8/19/2010	4:56:50 PM	PH3 valve closed
8/19/2010	4:56:50 PM	Main Vac valve closed
8/19/2010	4:56:50 PM	Bypass valve closed
8/19/2010	4:56:50 PM	H2 valve opened
8/19/2010	4:56:50 PM	BCl3 valve opened
8/19/2010	4:56:50 PM	SiCl4 pre valve opened
8/19/2010	4:56:50 PM	SiCl4 post valve opened
8/19/2010	4:56:50 PM	Bubbler valve opened
8/19/2010	4:56:50 PM	Helium MFC set to  0.000000
8/19/2010	4:56:50 PM	H2 MFC set to  500.000000
8/19/2010	4:56:50 PM	BCl3 MFC set to  15.000000
8/19/2010	4:56:50 PM	PHl3 MFC set to  0.000000
8/19/2010	4:56:50 PM	SiCl4 MFC set to  50.000000
8/19/2010	4:56:50 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	4:56:50 PM	Tube furnace set to 1000
8/19/2010	5:08:50 PM	BCl3 valve closed
8/19/2010	5:08:50 PM	PH3 valve closed
8/19/2010	5:08:50 PM	SiCl4 pre valve closed
8/19/2010	5:08:50 PM	SiCl4 post valve closed
8/19/2010	5:08:50 PM	Main Vac valve closed
8/19/2010	5:08:50 PM	Bypass valve closed
8/19/2010	5:08:50 PM	Helium valve opened
8/19/2010	5:08:50 PM	H2 valve opened
8/19/2010	5:08:50 PM	Bubbler valve opened
8/19/2010	5:08:50 PM	Helium MFC set to  250.000000
8/19/2010	5:08:50 PM	H2 MFC set to  250.000000
8/19/2010	5:08:50 PM	BCl3 MFC set to  0.000000
8/19/2010	5:08:50 PM	PHl3 MFC set to  0.000000
8/19/2010	5:08:50 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:08:50 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:08:50 PM	Tube furnace set to 0
8/19/2010	5:20:03 PM	Helium valve closed
8/19/2010	5:20:03 PM	H2 valve closed
8/19/2010	5:20:03 PM	BCl3 valve closed
8/19/2010	5:20:03 PM	PH3 valve closed
8/19/2010	5:20:03 PM	SiCl4 pre valve closed
8/19/2010	5:20:03 PM	SiCl4 post valve closed
8/19/2010	5:20:03 PM	Main Vac valve closed
8/19/2010	5:20:03 PM	Bypass valve closed
8/19/2010	5:20:03 PM	Bubbler valve closed
8/19/2010	5:20:03 PM	Helium MFC set to  0.000000
8/19/2010	5:20:03 PM	H2 MFC set to  0.000000
8/19/2010	5:20:03 PM	BCl3 MFC set to  0.000000
8/19/2010	5:20:03 PM	PHl3 MFC set to  0.000000
8/19/2010	5:20:03 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:20:03 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:20:04 PM	Tube furnace set to 0
8/19/2010	5:20:04 PM	Run finished at 5:20 PM
8/19/2010	5:20:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	5:20:08 PM	Recipe started at 5:20 PM
8/19/2010	5:20:08 PM	H2 valve closed
8/19/2010	5:20:08 PM	BCl3 valve closed
8/19/2010	5:20:08 PM	PH3 valve closed
8/19/2010	5:20:08 PM	SiCl4 pre valve closed
8/19/2010	5:20:08 PM	SiCl4 post valve closed
8/19/2010	5:20:08 PM	Main Vac valve closed
8/19/2010	5:20:08 PM	Bypass valve closed
8/19/2010	5:20:08 PM	Bubbler valve closed
8/19/2010	5:20:08 PM	Helium valve opened
8/19/2010	5:20:08 PM	Helium MFC set to  500.000000
8/19/2010	5:20:08 PM	H2 MFC set to  0.000000
8/19/2010	5:20:08 PM	BCl3 MFC set to  0.000000
8/19/2010	5:20:08 PM	PHl3 MFC set to  0.000000
8/19/2010	5:20:08 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:20:08 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:20:08 PM	Tube furnace set to 0
8/19/2010	5:20:08 PM	Helium valve closed
8/19/2010	5:20:08 PM	H2 valve closed
8/19/2010	5:20:08 PM	BCl3 valve closed
8/19/2010	5:20:08 PM	PH3 valve closed
8/19/2010	5:20:08 PM	SiCl4 pre valve closed
8/19/2010	5:20:08 PM	SiCl4 post valve closed
8/19/2010	5:20:08 PM	Main Vac valve closed
8/19/2010	5:20:08 PM	Bypass valve closed
8/19/2010	5:20:08 PM	Bubbler valve closed
8/19/2010	5:20:08 PM	Helium MFC set to  0.000000
8/19/2010	5:20:08 PM	H2 MFC set to  0.000000
8/19/2010	5:20:08 PM	BCl3 MFC set to  0.000000
8/19/2010	5:20:08 PM	PHl3 MFC set to  0.000000
8/19/2010	5:20:08 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:20:08 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:20:08 PM	Tube furnace set to 0
8/19/2010	5:20:09 PM	Run finished at 5:20 PM
8/19/2010	5:20:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	5:26:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	5:26:45 PM	Recipe started at 5:26 PM
8/19/2010	5:26:45 PM	Helium valve closed
8/19/2010	5:26:45 PM	H2 valve closed
8/19/2010	5:26:45 PM	BCl3 valve closed
8/19/2010	5:26:45 PM	PH3 valve closed
8/19/2010	5:26:45 PM	SiCl4 pre valve closed
8/19/2010	5:26:45 PM	SiCl4 post valve closed
8/19/2010	5:26:45 PM	Main Vac valve closed
8/19/2010	5:26:45 PM	Bubbler valve closed
8/19/2010	5:26:45 PM	Bypass valve opened
8/19/2010	5:26:45 PM	Helium MFC set to  0.000000
8/19/2010	5:26:45 PM	H2 MFC set to  0.000000
8/19/2010	5:26:45 PM	BCl3 MFC set to  0.000000
8/19/2010	5:26:45 PM	PHl3 MFC set to  0.000000
8/19/2010	5:26:45 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:26:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:26:46 PM	Tube furnace set to 0
8/19/2010	5:27:22 PM	Helium valve closed
8/19/2010	5:27:22 PM	H2 valve closed
8/19/2010	5:27:22 PM	BCl3 valve closed
8/19/2010	5:27:22 PM	PH3 valve closed
8/19/2010	5:27:22 PM	SiCl4 pre valve closed
8/19/2010	5:27:22 PM	SiCl4 post valve closed
8/19/2010	5:27:22 PM	Bubbler valve closed
8/19/2010	5:27:22 PM	Main Vac valve opened
8/19/2010	5:27:22 PM	Bypass valve opened
8/19/2010	5:27:22 PM	Helium MFC set to  0.000000
8/19/2010	5:27:22 PM	H2 MFC set to  0.000000
8/19/2010	5:27:22 PM	BCl3 MFC set to  0.000000
8/19/2010	5:27:22 PM	PHl3 MFC set to  0.000000
8/19/2010	5:27:22 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:27:22 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:27:22 PM	Tube furnace set to 0
8/19/2010	5:27:23 PM	Run finished at 5:27 PM
8/19/2010	5:27:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	5:29:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	5:29:41 PM	Recipe started at 5:29 PM
8/19/2010	5:29:41 PM	H2 valve closed
8/19/2010	5:29:41 PM	BCl3 valve closed
8/19/2010	5:29:41 PM	PH3 valve closed
8/19/2010	5:29:41 PM	SiCl4 pre valve closed
8/19/2010	5:29:41 PM	SiCl4 post valve closed
8/19/2010	5:29:41 PM	Main Vac valve closed
8/19/2010	5:29:41 PM	Bypass valve closed
8/19/2010	5:29:41 PM	Bubbler valve closed
8/19/2010	5:29:41 PM	Helium valve opened
8/19/2010	5:29:41 PM	Helium MFC set to  500.000000
8/19/2010	5:29:41 PM	H2 MFC set to  0.000000
8/19/2010	5:29:41 PM	BCl3 MFC set to  0.000000
8/19/2010	5:29:41 PM	PHl3 MFC set to  0.000000
8/19/2010	5:29:41 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:29:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:29:41 PM	Tube furnace set to 0
8/19/2010	5:31:00 PM	Helium valve closed
8/19/2010	5:31:00 PM	H2 valve closed
8/19/2010	5:31:00 PM	BCl3 valve closed
8/19/2010	5:31:00 PM	PH3 valve closed
8/19/2010	5:31:00 PM	SiCl4 pre valve closed
8/19/2010	5:31:00 PM	SiCl4 post valve closed
8/19/2010	5:31:00 PM	Main Vac valve closed
8/19/2010	5:31:00 PM	Bypass valve closed
8/19/2010	5:31:00 PM	Bubbler valve closed
8/19/2010	5:31:00 PM	Helium MFC set to  0.000000
8/19/2010	5:31:00 PM	H2 MFC set to  0.000000
8/19/2010	5:31:00 PM	BCl3 MFC set to  0.000000
8/19/2010	5:31:00 PM	PHl3 MFC set to  0.000000
8/19/2010	5:31:00 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:31:00 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:31:00 PM	Tube furnace set to 0
8/19/2010	5:31:15 PM	Helium valve closed
8/19/2010	5:31:15 PM	H2 valve closed
8/19/2010	5:31:15 PM	BCl3 valve closed
8/19/2010	5:31:15 PM	PH3 valve closed
8/19/2010	5:31:15 PM	SiCl4 pre valve closed
8/19/2010	5:31:15 PM	SiCl4 post valve closed
8/19/2010	5:31:15 PM	Main Vac valve closed
8/19/2010	5:31:15 PM	Bubbler valve closed
8/19/2010	5:31:15 PM	Bypass valve opened
8/19/2010	5:31:15 PM	Helium MFC set to  0.000000
8/19/2010	5:31:15 PM	H2 MFC set to  0.000000
8/19/2010	5:31:15 PM	BCl3 MFC set to  0.000000
8/19/2010	5:31:15 PM	PHl3 MFC set to  0.000000
8/19/2010	5:31:15 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:31:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:31:15 PM	Tube furnace set to 0
8/19/2010	5:31:42 PM	Helium valve closed
8/19/2010	5:31:42 PM	H2 valve closed
8/19/2010	5:31:42 PM	BCl3 valve closed
8/19/2010	5:31:42 PM	PH3 valve closed
8/19/2010	5:31:42 PM	SiCl4 pre valve closed
8/19/2010	5:31:42 PM	SiCl4 post valve closed
8/19/2010	5:31:42 PM	Bubbler valve closed
8/19/2010	5:31:42 PM	Main Vac valve opened
8/19/2010	5:31:42 PM	Bypass valve opened
8/19/2010	5:31:42 PM	Helium MFC set to  0.000000
8/19/2010	5:31:42 PM	H2 MFC set to  0.000000
8/19/2010	5:31:42 PM	BCl3 MFC set to  0.000000
8/19/2010	5:31:42 PM	PHl3 MFC set to  0.000000
8/19/2010	5:31:42 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:31:42 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:31:43 PM	Tube furnace set to 0
8/19/2010	5:36:43 PM	H2 valve closed
8/19/2010	5:36:43 PM	BCl3 valve closed
8/19/2010	5:36:43 PM	PH3 valve closed
8/19/2010	5:36:43 PM	SiCl4 pre valve closed
8/19/2010	5:36:43 PM	SiCl4 post valve closed
8/19/2010	5:36:43 PM	Main Vac valve closed
8/19/2010	5:36:43 PM	Bypass valve closed
8/19/2010	5:36:43 PM	Bubbler valve closed
8/19/2010	5:36:43 PM	Helium valve opened
8/19/2010	5:36:43 PM	Helium MFC set to  500.000000
8/19/2010	5:36:43 PM	H2 MFC set to  0.000000
8/19/2010	5:36:43 PM	BCl3 MFC set to  0.000000
8/19/2010	5:36:43 PM	PHl3 MFC set to  0.000000
8/19/2010	5:36:43 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:36:43 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:36:43 PM	Tube furnace set to 0
8/19/2010	5:38:02 PM	Helium valve closed
8/19/2010	5:38:02 PM	H2 valve closed
8/19/2010	5:38:02 PM	BCl3 valve closed
8/19/2010	5:38:02 PM	PH3 valve closed
8/19/2010	5:38:02 PM	SiCl4 pre valve closed
8/19/2010	5:38:02 PM	SiCl4 post valve closed
8/19/2010	5:38:02 PM	Main Vac valve closed
8/19/2010	5:38:02 PM	Bypass valve closed
8/19/2010	5:38:02 PM	Bubbler valve closed
8/19/2010	5:38:02 PM	Helium MFC set to  0.000000
8/19/2010	5:38:02 PM	H2 MFC set to  0.000000
8/19/2010	5:38:02 PM	BCl3 MFC set to  0.000000
8/19/2010	5:38:02 PM	PHl3 MFC set to  0.000000
8/19/2010	5:38:02 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:38:02 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:38:02 PM	Tube furnace set to 0
8/19/2010	5:38:17 PM	Helium valve closed
8/19/2010	5:38:17 PM	H2 valve closed
8/19/2010	5:38:17 PM	BCl3 valve closed
8/19/2010	5:38:17 PM	PH3 valve closed
8/19/2010	5:38:17 PM	SiCl4 pre valve closed
8/19/2010	5:38:17 PM	SiCl4 post valve closed
8/19/2010	5:38:17 PM	Main Vac valve closed
8/19/2010	5:38:17 PM	Bubbler valve closed
8/19/2010	5:38:17 PM	Bypass valve opened
8/19/2010	5:38:17 PM	Helium MFC set to  0.000000
8/19/2010	5:38:17 PM	H2 MFC set to  0.000000
8/19/2010	5:38:17 PM	BCl3 MFC set to  0.000000
8/19/2010	5:38:17 PM	PHl3 MFC set to  0.000000
8/19/2010	5:38:17 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:38:17 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:38:17 PM	Tube furnace set to 0
8/19/2010	5:38:45 PM	Helium valve closed
8/19/2010	5:38:45 PM	H2 valve closed
8/19/2010	5:38:45 PM	BCl3 valve closed
8/19/2010	5:38:45 PM	PH3 valve closed
8/19/2010	5:38:45 PM	SiCl4 pre valve closed
8/19/2010	5:38:45 PM	SiCl4 post valve closed
8/19/2010	5:38:45 PM	Bubbler valve closed
8/19/2010	5:38:45 PM	Main Vac valve opened
8/19/2010	5:38:45 PM	Bypass valve opened
8/19/2010	5:38:45 PM	Helium MFC set to  0.000000
8/19/2010	5:38:45 PM	H2 MFC set to  0.000000
8/19/2010	5:38:45 PM	BCl3 MFC set to  0.000000
8/19/2010	5:38:45 PM	PHl3 MFC set to  0.000000
8/19/2010	5:38:45 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:38:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:38:45 PM	Tube furnace set to 0
8/19/2010	5:43:45 PM	H2 valve closed
8/19/2010	5:43:45 PM	BCl3 valve closed
8/19/2010	5:43:45 PM	PH3 valve closed
8/19/2010	5:43:45 PM	SiCl4 pre valve closed
8/19/2010	5:43:45 PM	SiCl4 post valve closed
8/19/2010	5:43:45 PM	Main Vac valve closed
8/19/2010	5:43:45 PM	Bypass valve closed
8/19/2010	5:43:45 PM	Bubbler valve closed
8/19/2010	5:43:45 PM	Helium valve opened
8/19/2010	5:43:45 PM	Helium MFC set to  500.000000
8/19/2010	5:43:45 PM	H2 MFC set to  0.000000
8/19/2010	5:43:45 PM	BCl3 MFC set to  0.000000
8/19/2010	5:43:45 PM	PHl3 MFC set to  0.000000
8/19/2010	5:43:45 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:43:45 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:43:45 PM	Tube furnace set to 0
8/19/2010	5:45:05 PM	Helium valve closed
8/19/2010	5:45:05 PM	H2 valve closed
8/19/2010	5:45:05 PM	BCl3 valve closed
8/19/2010	5:45:05 PM	PH3 valve closed
8/19/2010	5:45:05 PM	SiCl4 pre valve closed
8/19/2010	5:45:05 PM	SiCl4 post valve closed
8/19/2010	5:45:05 PM	Main Vac valve closed
8/19/2010	5:45:05 PM	Bypass valve closed
8/19/2010	5:45:05 PM	Bubbler valve closed
8/19/2010	5:45:05 PM	Helium MFC set to  0.000000
8/19/2010	5:45:05 PM	H2 MFC set to  0.000000
8/19/2010	5:45:05 PM	BCl3 MFC set to  0.000000
8/19/2010	5:45:05 PM	PHl3 MFC set to  0.000000
8/19/2010	5:45:05 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:45:05 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:45:05 PM	Tube furnace set to 0
8/19/2010	5:45:20 PM	Helium valve closed
8/19/2010	5:45:20 PM	H2 valve closed
8/19/2010	5:45:20 PM	BCl3 valve closed
8/19/2010	5:45:20 PM	PH3 valve closed
8/19/2010	5:45:20 PM	SiCl4 pre valve closed
8/19/2010	5:45:20 PM	SiCl4 post valve closed
8/19/2010	5:45:20 PM	Main Vac valve closed
8/19/2010	5:45:20 PM	Bubbler valve closed
8/19/2010	5:45:20 PM	Bypass valve opened
8/19/2010	5:45:20 PM	Helium MFC set to  0.000000
8/19/2010	5:45:20 PM	H2 MFC set to  0.000000
8/19/2010	5:45:20 PM	BCl3 MFC set to  0.000000
8/19/2010	5:45:20 PM	PHl3 MFC set to  0.000000
8/19/2010	5:45:20 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:45:20 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:45:20 PM	Tube furnace set to 0
8/19/2010	5:45:48 PM	Helium valve closed
8/19/2010	5:45:48 PM	H2 valve closed
8/19/2010	5:45:48 PM	BCl3 valve closed
8/19/2010	5:45:48 PM	PH3 valve closed
8/19/2010	5:45:48 PM	SiCl4 pre valve closed
8/19/2010	5:45:48 PM	SiCl4 post valve closed
8/19/2010	5:45:48 PM	Bubbler valve closed
8/19/2010	5:45:48 PM	Main Vac valve opened
8/19/2010	5:45:48 PM	Bypass valve opened
8/19/2010	5:45:48 PM	Helium MFC set to  0.000000
8/19/2010	5:45:48 PM	H2 MFC set to  0.000000
8/19/2010	5:45:48 PM	BCl3 MFC set to  0.000000
8/19/2010	5:45:48 PM	PHl3 MFC set to  0.000000
8/19/2010	5:45:48 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:45:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:45:48 PM	Tube furnace set to 0
8/19/2010	5:46:21 PM	Helium valve closed
8/19/2010	5:46:21 PM	H2 valve closed
8/19/2010	5:46:21 PM	BCl3 valve closed
8/19/2010	5:46:21 PM	PH3 valve closed
8/19/2010	5:46:21 PM	SiCl4 pre valve closed
8/19/2010	5:46:21 PM	SiCl4 post valve closed
8/19/2010	5:46:21 PM	Bubbler valve closed
8/19/2010	5:46:21 PM	Main Vac valve opened
8/19/2010	5:46:21 PM	Bypass valve opened
8/19/2010	5:46:21 PM	Helium MFC set to  0.000000
8/19/2010	5:46:21 PM	H2 MFC set to  0.000000
8/19/2010	5:46:21 PM	BCl3 MFC set to  0.000000
8/19/2010	5:46:21 PM	PHl3 MFC set to  0.000000
8/19/2010	5:46:21 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:46:21 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:46:21 PM	Tube furnace set to 0
8/19/2010	5:46:22 PM	Run finished at 5:46 PM
8/19/2010	5:46:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/19/2010	5:46:24 PM	Main Vac valve closed
8/19/2010	5:46:25 PM	Bypass valve closed
8/19/2010	5:46:58 PM	Main Vac valve opened
8/19/2010	5:46:59 PM	Bypass valve opened
8/19/2010	5:47:27 PM	Main Vac valve closed
8/19/2010	5:47:31 PM	Bypass valve closed
8/19/2010	5:47:39 PM	Bypass valve opened
8/19/2010	5:47:40 PM	Main Vac valve opened
8/19/2010	5:47:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	5:47:46 PM	Recipe started at 5:47 PM
8/19/2010	5:47:46 PM	H2 valve closed
8/19/2010	5:47:46 PM	BCl3 valve closed
8/19/2010	5:47:46 PM	PH3 valve closed
8/19/2010	5:47:46 PM	SiCl4 pre valve closed
8/19/2010	5:47:46 PM	SiCl4 post valve closed
8/19/2010	5:47:46 PM	Main Vac valve closed
8/19/2010	5:47:46 PM	Bypass valve closed
8/19/2010	5:47:46 PM	Bubbler valve closed
8/19/2010	5:47:46 PM	Helium valve opened
8/19/2010	5:47:46 PM	Helium MFC set to  500.000000
8/19/2010	5:47:46 PM	H2 MFC set to  0.000000
8/19/2010	5:47:46 PM	BCl3 MFC set to  0.000000
8/19/2010	5:47:46 PM	PHl3 MFC set to  0.000000
8/19/2010	5:47:46 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:47:46 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:47:46 PM	Tube furnace set to 0
8/19/2010	5:49:04 PM	Helium valve closed
8/19/2010	5:49:04 PM	H2 valve closed
8/19/2010	5:49:04 PM	BCl3 valve closed
8/19/2010	5:49:04 PM	PH3 valve closed
8/19/2010	5:49:04 PM	SiCl4 pre valve closed
8/19/2010	5:49:04 PM	SiCl4 post valve closed
8/19/2010	5:49:04 PM	Main Vac valve closed
8/19/2010	5:49:04 PM	Bypass valve closed
8/19/2010	5:49:04 PM	Bubbler valve closed
8/19/2010	5:49:04 PM	Helium MFC set to  0.000000
8/19/2010	5:49:04 PM	H2 MFC set to  0.000000
8/19/2010	5:49:04 PM	BCl3 MFC set to  0.000000
8/19/2010	5:49:04 PM	PHl3 MFC set to  0.000000
8/19/2010	5:49:04 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:49:04 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:49:04 PM	Tube furnace set to 0
8/19/2010	5:49:05 PM	Run finished at 5:49 PM
8/19/2010	5:49:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	5:52:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	5:52:54 PM	Recipe started at 5:52 PM
8/19/2010	5:52:54 PM	Helium valve closed
8/19/2010	5:52:54 PM	H2 valve closed
8/19/2010	5:52:54 PM	BCl3 valve closed
8/19/2010	5:52:54 PM	PH3 valve closed
8/19/2010	5:52:54 PM	SiCl4 pre valve closed
8/19/2010	5:52:54 PM	SiCl4 post valve closed
8/19/2010	5:52:54 PM	Main Vac valve closed
8/19/2010	5:52:54 PM	Bubbler valve closed
8/19/2010	5:52:54 PM	Bypass valve opened
8/19/2010	5:52:54 PM	Helium MFC set to  0.000000
8/19/2010	5:52:54 PM	H2 MFC set to  0.000000
8/19/2010	5:52:54 PM	BCl3 MFC set to  0.000000
8/19/2010	5:52:54 PM	PHl3 MFC set to  0.000000
8/19/2010	5:52:54 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:52:54 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:52:55 PM	Tube furnace set to 0
8/19/2010	5:54:31 PM	Helium valve closed
8/19/2010	5:54:31 PM	H2 valve closed
8/19/2010	5:54:31 PM	BCl3 valve closed
8/19/2010	5:54:31 PM	PH3 valve closed
8/19/2010	5:54:31 PM	SiCl4 pre valve closed
8/19/2010	5:54:31 PM	SiCl4 post valve closed
8/19/2010	5:54:31 PM	Bubbler valve closed
8/19/2010	5:54:31 PM	Main Vac valve opened
8/19/2010	5:54:31 PM	Bypass valve opened
8/19/2010	5:54:31 PM	Helium MFC set to  0.000000
8/19/2010	5:54:31 PM	H2 MFC set to  0.000000
8/19/2010	5:54:31 PM	BCl3 MFC set to  0.000000
8/19/2010	5:54:31 PM	PHl3 MFC set to  0.000000
8/19/2010	5:54:31 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:54:31 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:54:32 PM	Tube furnace set to 0
8/19/2010	5:54:32 PM	Run finished at 5:54 PM
8/19/2010	5:54:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	5:55:55 PM	Main Vac valve closed
8/19/2010	5:55:57 PM	Bypass valve closed
8/19/2010	5:56:04 PM	Bypass valve opened
8/19/2010	5:56:05 PM	Main Vac valve opened
8/19/2010	5:56:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	5:56:58 PM	Recipe started at 5:56 PM
8/19/2010	5:56:58 PM	Helium valve closed
8/19/2010	5:56:58 PM	H2 valve closed
8/19/2010	5:56:58 PM	BCl3 valve closed
8/19/2010	5:56:58 PM	PH3 valve closed
8/19/2010	5:56:58 PM	SiCl4 pre valve closed
8/19/2010	5:56:58 PM	SiCl4 post valve closed
8/19/2010	5:56:58 PM	Main Vac valve closed
8/19/2010	5:56:58 PM	Bubbler valve closed
8/19/2010	5:56:58 PM	Bypass valve opened
8/19/2010	5:56:58 PM	Helium MFC set to  0.000000
8/19/2010	5:56:58 PM	H2 MFC set to  0.000000
8/19/2010	5:56:58 PM	BCl3 MFC set to  0.000000
8/19/2010	5:56:58 PM	PHl3 MFC set to  0.000000
8/19/2010	5:56:58 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:56:58 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:56:58 PM	Tube furnace set to 0
8/19/2010	5:56:58 PM	Helium valve closed
8/19/2010	5:56:58 PM	H2 valve closed
8/19/2010	5:56:58 PM	BCl3 valve closed
8/19/2010	5:56:58 PM	PH3 valve closed
8/19/2010	5:56:58 PM	SiCl4 pre valve closed
8/19/2010	5:56:58 PM	SiCl4 post valve closed
8/19/2010	5:56:58 PM	Bubbler valve closed
8/19/2010	5:56:58 PM	Main Vac valve opened
8/19/2010	5:56:58 PM	Bypass valve opened
8/19/2010	5:56:58 PM	Helium MFC set to  0.000000
8/19/2010	5:56:58 PM	H2 MFC set to  0.000000
8/19/2010	5:56:58 PM	BCl3 MFC set to  0.000000
8/19/2010	5:56:58 PM	PHl3 MFC set to  0.000000
8/19/2010	5:56:58 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:56:58 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:56:58 PM	Tube furnace set to 0
8/19/2010	5:57:15 PM	H2 valve closed
8/19/2010	5:57:15 PM	BCl3 valve closed
8/19/2010	5:57:15 PM	PH3 valve closed
8/19/2010	5:57:15 PM	SiCl4 pre valve closed
8/19/2010	5:57:15 PM	SiCl4 post valve closed
8/19/2010	5:57:15 PM	Bubbler valve closed
8/19/2010	5:57:15 PM	Helium valve opened
8/19/2010	5:57:15 PM	Main Vac valve opened
8/19/2010	5:57:15 PM	Bypass valve opened
8/19/2010	5:57:15 PM	Helium MFC set to  100.000000
8/19/2010	5:57:15 PM	H2 MFC set to  0.000000
8/19/2010	5:57:15 PM	BCl3 MFC set to  0.000000
8/19/2010	5:57:15 PM	PHl3 MFC set to  0.000000
8/19/2010	5:57:15 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:57:15 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:57:15 PM	Tube furnace set to 0
8/19/2010	5:58:50 PM	Helium valve closed
8/19/2010	5:58:50 PM	H2 valve closed
8/19/2010	5:58:50 PM	BCl3 valve closed
8/19/2010	5:58:50 PM	PH3 valve closed
8/19/2010	5:58:50 PM	SiCl4 pre valve closed
8/19/2010	5:58:50 PM	SiCl4 post valve closed
8/19/2010	5:58:50 PM	Bubbler valve closed
8/19/2010	5:58:50 PM	Main Vac valve opened
8/19/2010	5:58:50 PM	Bypass valve opened
8/19/2010	5:58:50 PM	Helium MFC set to  0.000000
8/19/2010	5:58:50 PM	H2 MFC set to  0.000000
8/19/2010	5:58:50 PM	BCl3 MFC set to  0.000000
8/19/2010	5:58:50 PM	PHl3 MFC set to  0.000000
8/19/2010	5:58:50 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:58:50 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:58:50 PM	Tube furnace set to 0
8/19/2010	5:59:21 PM	H2 valve closed
8/19/2010	5:59:21 PM	BCl3 valve closed
8/19/2010	5:59:21 PM	PH3 valve closed
8/19/2010	5:59:21 PM	SiCl4 pre valve closed
8/19/2010	5:59:21 PM	SiCl4 post valve closed
8/19/2010	5:59:21 PM	Bubbler valve closed
8/19/2010	5:59:21 PM	Helium valve opened
8/19/2010	5:59:21 PM	Main Vac valve opened
8/19/2010	5:59:21 PM	Bypass valve opened
8/19/2010	5:59:21 PM	Helium MFC set to  100.000000
8/19/2010	5:59:21 PM	H2 MFC set to  0.000000
8/19/2010	5:59:21 PM	BCl3 MFC set to  0.000000
8/19/2010	5:59:21 PM	PHl3 MFC set to  0.000000
8/19/2010	5:59:21 PM	SiCl4 MFC set to  0.000000
8/19/2010	5:59:21 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	5:59:21 PM	Tube furnace set to 0
8/19/2010	6:02:41 PM	Helium valve closed
8/19/2010	6:02:41 PM	H2 valve closed
8/19/2010	6:02:41 PM	BCl3 valve closed
8/19/2010	6:02:41 PM	PH3 valve closed
8/19/2010	6:02:41 PM	SiCl4 pre valve closed
8/19/2010	6:02:41 PM	SiCl4 post valve closed
8/19/2010	6:02:41 PM	Bubbler valve closed
8/19/2010	6:02:41 PM	Main Vac valve opened
8/19/2010	6:02:41 PM	Bypass valve opened
8/19/2010	6:02:41 PM	Helium MFC set to  0.000000
8/19/2010	6:02:41 PM	H2 MFC set to  0.000000
8/19/2010	6:02:41 PM	BCl3 MFC set to  0.000000
8/19/2010	6:02:41 PM	PHl3 MFC set to  0.000000
8/19/2010	6:02:41 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:02:41 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:02:41 PM	Tube furnace set to 0
8/19/2010	6:03:16 PM	H2 valve closed
8/19/2010	6:03:16 PM	BCl3 valve closed
8/19/2010	6:03:17 PM	PH3 valve closed
8/19/2010	6:03:17 PM	SiCl4 pre valve closed
8/19/2010	6:03:17 PM	SiCl4 post valve closed
8/19/2010	6:03:17 PM	Bubbler valve closed
8/19/2010	6:03:17 PM	Helium valve opened
8/19/2010	6:03:17 PM	Main Vac valve opened
8/19/2010	6:03:17 PM	Bypass valve opened
8/19/2010	6:03:17 PM	Helium MFC set to  100.000000
8/19/2010	6:03:17 PM	H2 MFC set to  0.000000
8/19/2010	6:03:17 PM	BCl3 MFC set to  0.000000
8/19/2010	6:03:17 PM	PHl3 MFC set to  0.000000
8/19/2010	6:03:17 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:03:17 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:03:17 PM	Tube furnace set to 0
8/19/2010	6:12:17 PM	Helium valve closed
8/19/2010	6:12:17 PM	H2 valve closed
8/19/2010	6:12:17 PM	BCl3 valve closed
8/19/2010	6:12:17 PM	PH3 valve closed
8/19/2010	6:12:17 PM	SiCl4 pre valve closed
8/19/2010	6:12:17 PM	SiCl4 post valve closed
8/19/2010	6:12:17 PM	Bubbler valve closed
8/19/2010	6:12:17 PM	Main Vac valve opened
8/19/2010	6:12:17 PM	Bypass valve opened
8/19/2010	6:12:17 PM	Helium MFC set to  0.000000
8/19/2010	6:12:17 PM	H2 MFC set to  0.000000
8/19/2010	6:12:17 PM	BCl3 MFC set to  0.000000
8/19/2010	6:12:17 PM	PHl3 MFC set to  0.000000
8/19/2010	6:12:17 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:12:17 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:12:17 PM	Tube furnace set to 0
8/19/2010	6:12:18 PM	Run finished at 6:12 PM
8/19/2010	6:12:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	6:12:46 PM	Main Vac valve closed
8/19/2010	6:12:48 PM	Bypass valve closed
8/19/2010	6:13:20 PM	Main Vac valve opened
8/19/2010	6:13:20 PM	Bypass valve opened
8/19/2010	6:15:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	6:15:20 PM	Recipe started at 6:15 PM
8/19/2010	6:15:20 PM	H2 valve closed
8/19/2010	6:15:20 PM	BCl3 valve closed
8/19/2010	6:15:20 PM	PH3 valve closed
8/19/2010	6:15:20 PM	SiCl4 pre valve closed
8/19/2010	6:15:20 PM	SiCl4 post valve closed
8/19/2010	6:15:20 PM	Main Vac valve closed
8/19/2010	6:15:20 PM	Bypass valve closed
8/19/2010	6:15:20 PM	Bubbler valve closed
8/19/2010	6:15:20 PM	Helium valve opened
8/19/2010	6:15:20 PM	Helium MFC set to  500.000000
8/19/2010	6:15:20 PM	H2 MFC set to  0.000000
8/19/2010	6:15:20 PM	BCl3 MFC set to  0.000000
8/19/2010	6:15:20 PM	PHl3 MFC set to  0.000000
8/19/2010	6:15:20 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:15:20 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:15:21 PM	Tube furnace set to 0
8/19/2010	6:16:39 PM	Helium valve closed
8/19/2010	6:16:39 PM	H2 valve closed
8/19/2010	6:16:39 PM	BCl3 valve closed
8/19/2010	6:16:39 PM	PH3 valve closed
8/19/2010	6:16:39 PM	SiCl4 pre valve closed
8/19/2010	6:16:39 PM	SiCl4 post valve closed
8/19/2010	6:16:39 PM	Main Vac valve closed
8/19/2010	6:16:39 PM	Bypass valve closed
8/19/2010	6:16:39 PM	Bubbler valve closed
8/19/2010	6:16:39 PM	Helium MFC set to  0.000000
8/19/2010	6:16:39 PM	H2 MFC set to  0.000000
8/19/2010	6:16:39 PM	BCl3 MFC set to  0.000000
8/19/2010	6:16:39 PM	PHl3 MFC set to  0.000000
8/19/2010	6:16:39 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:16:39 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:16:39 PM	Tube furnace set to 0
8/19/2010	6:16:40 PM	Run finished at 6:16 PM
8/19/2010	6:16:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/19/2010	6:20:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	6:20:48 PM	Recipe started at 6:20 PM
8/19/2010	6:20:48 PM	Helium valve closed
8/19/2010	6:20:48 PM	H2 valve closed
8/19/2010	6:20:48 PM	BCl3 valve closed
8/19/2010	6:20:48 PM	PH3 valve closed
8/19/2010	6:20:48 PM	SiCl4 pre valve closed
8/19/2010	6:20:48 PM	SiCl4 post valve closed
8/19/2010	6:20:48 PM	Main Vac valve closed
8/19/2010	6:20:48 PM	Bubbler valve closed
8/19/2010	6:20:48 PM	Bypass valve opened
8/19/2010	6:20:48 PM	Helium MFC set to  0.000000
8/19/2010	6:20:48 PM	H2 MFC set to  0.000000
8/19/2010	6:20:48 PM	BCl3 MFC set to  0.000000
8/19/2010	6:20:48 PM	PHl3 MFC set to  0.000000
8/19/2010	6:20:48 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:20:48 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:20:48 PM	Tube furnace set to 0
8/19/2010	6:21:26 PM	Helium valve closed
8/19/2010	6:21:26 PM	H2 valve closed
8/19/2010	6:21:26 PM	BCl3 valve closed
8/19/2010	6:21:26 PM	PH3 valve closed
8/19/2010	6:21:26 PM	SiCl4 pre valve closed
8/19/2010	6:21:26 PM	SiCl4 post valve closed
8/19/2010	6:21:26 PM	Bubbler valve closed
8/19/2010	6:21:26 PM	Main Vac valve opened
8/19/2010	6:21:26 PM	Bypass valve opened
8/19/2010	6:21:26 PM	Helium MFC set to  0.000000
8/19/2010	6:21:26 PM	H2 MFC set to  0.000000
8/19/2010	6:21:26 PM	BCl3 MFC set to  0.000000
8/19/2010	6:21:26 PM	PHl3 MFC set to  0.000000
8/19/2010	6:21:26 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:21:26 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:21:26 PM	Tube furnace set to 0
8/19/2010	6:21:27 PM	Run finished at 6:21 PM
8/19/2010	6:21:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/19/2010	6:28:08 PM	Main Vac valve closed
8/19/2010	6:28:08 PM	Bypass valve closed
8/19/2010	6:28:24 PM	Bypass valve opened
8/19/2010	6:28:25 PM	Main Vac valve opened
8/19/2010	6:29:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/19/2010	6:29:23 PM	Recipe started at 6:29 PM
8/19/2010	6:29:23 PM	Helium valve closed
8/19/2010	6:29:23 PM	H2 valve closed
8/19/2010	6:29:23 PM	BCl3 valve closed
8/19/2010	6:29:23 PM	PH3 valve closed
8/19/2010	6:29:23 PM	SiCl4 pre valve closed
8/19/2010	6:29:23 PM	SiCl4 post valve closed
8/19/2010	6:29:23 PM	Main Vac valve closed
8/19/2010	6:29:23 PM	Bubbler valve closed
8/19/2010	6:29:23 PM	Bypass valve opened
8/19/2010	6:29:23 PM	Helium MFC set to  0.000000
8/19/2010	6:29:23 PM	H2 MFC set to  0.000000
8/19/2010	6:29:23 PM	BCl3 MFC set to  0.000000
8/19/2010	6:29:23 PM	PHl3 MFC set to  0.000000
8/19/2010	6:29:23 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:29:23 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:29:23 PM	Tube furnace set to 0
8/19/2010	6:29:23 PM	Helium valve closed
8/19/2010	6:29:23 PM	H2 valve closed
8/19/2010	6:29:23 PM	BCl3 valve closed
8/19/2010	6:29:23 PM	PH3 valve closed
8/19/2010	6:29:23 PM	SiCl4 pre valve closed
8/19/2010	6:29:23 PM	SiCl4 post valve closed
8/19/2010	6:29:23 PM	Bubbler valve closed
8/19/2010	6:29:23 PM	Main Vac valve opened
8/19/2010	6:29:23 PM	Bypass valve opened
8/19/2010	6:29:23 PM	Helium MFC set to  0.000000
8/19/2010	6:29:23 PM	H2 MFC set to  0.000000
8/19/2010	6:29:23 PM	BCl3 MFC set to  0.000000
8/19/2010	6:29:23 PM	PHl3 MFC set to  0.000000
8/19/2010	6:29:23 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:29:23 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:29:23 PM	Tube furnace set to 0
8/19/2010	6:30:23 PM	H2 valve closed
8/19/2010	6:30:23 PM	BCl3 valve closed
8/19/2010	6:30:23 PM	PH3 valve closed
8/19/2010	6:30:23 PM	SiCl4 pre valve closed
8/19/2010	6:30:23 PM	SiCl4 post valve closed
8/19/2010	6:30:23 PM	Bubbler valve closed
8/19/2010	6:30:23 PM	Helium valve opened
8/19/2010	6:30:23 PM	Main Vac valve opened
8/19/2010	6:30:23 PM	Bypass valve opened
8/19/2010	6:30:23 PM	Helium MFC set to  100.000000
8/19/2010	6:30:23 PM	H2 MFC set to  0.000000
8/19/2010	6:30:23 PM	BCl3 MFC set to  0.000000
8/19/2010	6:30:23 PM	PHl3 MFC set to  0.000000
8/19/2010	6:30:23 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:30:23 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:30:23 PM	Tube furnace set to 0
8/19/2010	6:39:23 PM	Helium valve closed
8/19/2010	6:39:23 PM	H2 valve closed
8/19/2010	6:39:23 PM	BCl3 valve closed
8/19/2010	6:39:23 PM	PH3 valve closed
8/19/2010	6:39:23 PM	SiCl4 pre valve closed
8/19/2010	6:39:23 PM	SiCl4 post valve closed
8/19/2010	6:39:23 PM	Bubbler valve closed
8/19/2010	6:39:23 PM	Main Vac valve opened
8/19/2010	6:39:23 PM	Bypass valve opened
8/19/2010	6:39:23 PM	Helium MFC set to  0.000000
8/19/2010	6:39:23 PM	H2 MFC set to  0.000000
8/19/2010	6:39:23 PM	BCl3 MFC set to  0.000000
8/19/2010	6:39:23 PM	PHl3 MFC set to  0.000000
8/19/2010	6:39:23 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:39:23 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:39:24 PM	Tube furnace set to 0
8/19/2010	6:40:24 PM	H2 valve closed
8/19/2010	6:40:24 PM	BCl3 valve closed
8/19/2010	6:40:24 PM	PH3 valve closed
8/19/2010	6:40:24 PM	SiCl4 pre valve closed
8/19/2010	6:40:24 PM	SiCl4 post valve closed
8/19/2010	6:40:24 PM	Bubbler valve closed
8/19/2010	6:40:24 PM	Helium valve opened
8/19/2010	6:40:24 PM	Main Vac valve opened
8/19/2010	6:40:24 PM	Bypass valve opened
8/19/2010	6:40:24 PM	Helium MFC set to  100.000000
8/19/2010	6:40:24 PM	H2 MFC set to  0.000000
8/19/2010	6:40:24 PM	BCl3 MFC set to  0.000000
8/19/2010	6:40:24 PM	PHl3 MFC set to  0.000000
8/19/2010	6:40:24 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:40:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:40:24 PM	Tube furnace set to 0
8/19/2010	6:49:24 PM	Helium valve closed
8/19/2010	6:49:24 PM	H2 valve closed
8/19/2010	6:49:24 PM	BCl3 valve closed
8/19/2010	6:49:24 PM	PH3 valve closed
8/19/2010	6:49:24 PM	SiCl4 pre valve closed
8/19/2010	6:49:24 PM	SiCl4 post valve closed
8/19/2010	6:49:24 PM	Bubbler valve closed
8/19/2010	6:49:24 PM	Main Vac valve opened
8/19/2010	6:49:24 PM	Bypass valve opened
8/19/2010	6:49:24 PM	Helium MFC set to  0.000000
8/19/2010	6:49:24 PM	H2 MFC set to  0.000000
8/19/2010	6:49:24 PM	BCl3 MFC set to  0.000000
8/19/2010	6:49:24 PM	PHl3 MFC set to  0.000000
8/19/2010	6:49:24 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:49:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:49:24 PM	Tube furnace set to 0
8/19/2010	6:50:24 PM	H2 valve closed
8/19/2010	6:50:24 PM	BCl3 valve closed
8/19/2010	6:50:24 PM	PH3 valve closed
8/19/2010	6:50:24 PM	SiCl4 pre valve closed
8/19/2010	6:50:24 PM	SiCl4 post valve closed
8/19/2010	6:50:24 PM	Bubbler valve closed
8/19/2010	6:50:24 PM	Helium valve opened
8/19/2010	6:50:24 PM	Main Vac valve opened
8/19/2010	6:50:24 PM	Bypass valve opened
8/19/2010	6:50:24 PM	Helium MFC set to  100.000000
8/19/2010	6:50:24 PM	H2 MFC set to  0.000000
8/19/2010	6:50:24 PM	BCl3 MFC set to  0.000000
8/19/2010	6:50:24 PM	PHl3 MFC set to  0.000000
8/19/2010	6:50:24 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:50:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:50:24 PM	Tube furnace set to 0
8/19/2010	6:59:24 PM	Helium valve closed
8/19/2010	6:59:24 PM	H2 valve closed
8/19/2010	6:59:24 PM	BCl3 valve closed
8/19/2010	6:59:24 PM	PH3 valve closed
8/19/2010	6:59:24 PM	SiCl4 pre valve closed
8/19/2010	6:59:24 PM	SiCl4 post valve closed
8/19/2010	6:59:24 PM	Bubbler valve closed
8/19/2010	6:59:24 PM	Main Vac valve opened
8/19/2010	6:59:24 PM	Bypass valve opened
8/19/2010	6:59:24 PM	Helium MFC set to  0.000000
8/19/2010	6:59:24 PM	H2 MFC set to  0.000000
8/19/2010	6:59:24 PM	BCl3 MFC set to  0.000000
8/19/2010	6:59:24 PM	PHl3 MFC set to  0.000000
8/19/2010	6:59:24 PM	SiCl4 MFC set to  0.000000
8/19/2010	6:59:24 PM	Bypass solenoid MFC set to  0.000000
8/19/2010	6:59:24 PM	Tube furnace set to 0
8/19/2010	6:59:25 PM	Run finished at 6:59 PM
8/19/2010	6:59:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
